Tetsuya Goto

Person

Sendai-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Capacitive sensor and manufacturing method of capacitive sensor
- Patent number 11,662,328
- Issue date May 30, 2023
- OHT Inc.
- Toshiro Yasuda
- G01 - MEASURING TESTING
Information Patent Grant
Capacitance detection area sensor and conductive pattern sensing ap...
- Patent number 11,567,114
- Issue date Jan 31, 2023
- TOHOKU UNIVERSITY
- Shigetoshi Sugawa
- G01 - MEASURING TESTING
Information Patent Grant
Oxide semiconductor device and method for manufacturing same
- Patent number 10,896,978
- Issue date Jan 19, 2021
- V Technology Co., Ltd.
- Tetsuya Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical modulation element
- Patent number 10,895,765
- Issue date Jan 19, 2021
- Sumitomo Osaka Cement Co., Ltd.
- Tetsuya Fujino
- G02 - OPTICS
Information Patent Grant
Method of production of semiconductor device
- Patent number 10,446,690
- Issue date Oct 15, 2019
- Tohoku University
- Tetsuya Goto
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Grant
Magnetron sputtering apparatus
- Patent number 9,812,302
- Issue date Nov 7, 2017
- National University Corporation Tohoku University
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shower plate sintered integrally with gas release hole member and m...
- Patent number 9,767,994
- Issue date Sep 19, 2017
- Tokyo Electron Limited
- Masahiro Okesaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wiring board and method of manufacturing the same
- Patent number 8,981,234
- Issue date Mar 17, 2015
- National University Corporation Tohoku University
- Tadahiro Ohmi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Shower plate sintered integrally with gas release hole member and m...
- Patent number 8,915,999
- Issue date Dec 23, 2014
- Tokyo Electron Limited
- Masahiro Okesaku
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device manufacturing method and semiconductor device
- Patent number 8,716,114
- Issue date May 6, 2014
- National University Corporation Tohoku University
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma processing apparatus, dielectric window for use in...
- Patent number 8,573,151
- Issue date Nov 5, 2013
- Tokyo Electron Limited
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron sputtering apparatus
- Patent number 8,568,577
- Issue date Oct 29, 2013
- National University Corporation Tohoku University
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotary magnet sputtering apparatus
- Patent number 8,535,494
- Issue date Sep 17, 2013
- National University Corporation Tohoku University
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotary magnet sputtering apparatus
- Patent number 8,496,792
- Issue date Jul 30, 2013
- National University Corporation Tohoku University
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implanting apparatus and ion implanting method
- Patent number 8,399,862
- Issue date Mar 19, 2013
- National University Corporation Tohoku University
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shower plate, method for manufacturing the shower plate, plasma pro...
- Patent number 8,372,200
- Issue date Feb 12, 2013
- Tokyo Electron Ltd.
- Masahiro Okesaku
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Shower plate, plasma processing apparatus, and product manufacturin...
- Patent number 7,879,182
- Issue date Feb 1, 2011
- Foundation For Advancement of International Science
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 7,670,454
- Issue date Mar 2, 2010
- Tokyo Electron Limited
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device and method of etchin...
- Patent number 7,528,074
- Issue date May 5, 2009
- Foundation for Advancement of International Science
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and control method for micro wave plasma processing
- Patent number 7,404,991
- Issue date Jul 29, 2008
- Tokyo Electron Limited
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma processing apparatus, microwave processing method...
- Patent number 7,325,511
- Issue date Feb 5, 2008
- Tokyo Electron Limited
- Naohisa Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma processing apparatus, plasma ignition method, plas...
- Patent number 7,141,756
- Issue date Nov 28, 2006
- Tokyo Electron Limited
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing device
- Patent number 7,115,184
- Issue date Oct 3, 2006
- Tokyo Electron Limited
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing device
- Patent number 7,097,735
- Issue date Aug 29, 2006
- Tadahiro Ohmi
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and method for plasma processing, and slow-wave plate
- Patent number 7,083,701
- Issue date Aug 1, 2006
- Tokyo Electron Limited
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma processing device, plasma processing method, and m...
- Patent number 6,818,852
- Issue date Nov 16, 2004
- Tokyo Electron Limited
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CAPACITIVE SENSOR AND MANUFACTURING METHOD OF CAPACITIVE SENSOR
- Publication number 20220011255
- Publication date Jan 13, 2022
- OHT INC.
- Toshiro YASUDA
- G01 - MEASURING TESTING
Information Patent Application
CAPACITANCE DETECTION AREA SENSOR AND CONDUCTIVE PATTERN SENSING AP...
- Publication number 20210293866
- Publication date Sep 23, 2021
- TOHOKU UNIVERSITY
- Shigetoshi SUGAWA
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL MODULATION ELEMENT
- Publication number 20200026146
- Publication date Jan 23, 2020
- Sumitomo Osaka Cement Co., Ltd.
- Tetsuya Fujino
- G02 - OPTICS
Information Patent Application
METHOD FOR MANUFACTURING OXIDE SEMICONDUCTOR DEVICE
- Publication number 20190326421
- Publication date Oct 24, 2019
- V TECHNOLOGY CO., LTD.
- Tetsuya Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OXIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20190288115
- Publication date Sep 19, 2019
- V TECHNOLOGY CO., LTD.
- Tetsuya Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PRODUCTION OF SEMICONDUCTOR DEVICE
- Publication number 20170186874
- Publication date Jun 29, 2017
- TOHOKU UNIVERSITY
- Tetsuya Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE STRUCTURE AND SECONDARY BATTERY
- Publication number 20160172666
- Publication date Jun 16, 2016
- New Nippon Metal Mining Industry Co., Ltd.
- Kenzo Shimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD
- Publication number 20150235817
- Publication date Aug 20, 2015
- Tetsuya Goto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND M...
- Publication number 20150069674
- Publication date Mar 12, 2015
- TOKYO ELECTRON LIMITED
- Masahiro OKESAKU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Implantation Apparatus, Ion Implantation Method, and Semiconduc...
- Publication number 20140151853
- Publication date Jun 5, 2014
- NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Tadahiro OHMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETRON SPUTTERING APPARATUS
- Publication number 20140027278
- Publication date Jan 30, 2014
- TOKYO ELECTRON LIMITED
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION ELEMENTS
- Publication number 20130295709
- Publication date Nov 7, 2013
- Tadahiro OHMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYER WIRING BOARD
- Publication number 20130235545
- Publication date Sep 12, 2013
- Zeon Corporation
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE
- Publication number 20130154059
- Publication date Jun 20, 2013
- NATIONAL UNIVERSITY CORP TOHOKU UNIVERSITY
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CATHODE BODY, FLUORESCENT TUBE, AND METHOD OF MANUFACTURING A CATHO...
- Publication number 20130154469
- Publication date Jun 20, 2013
- NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWER PLATE, MANUFACTURING METHOD OF THE SHOWER PLATE, AND PLASMA...
- Publication number 20130112337
- Publication date May 9, 2013
- NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Masahiro Okesaku
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
WET PROCESSING APPARATUS AND WET PROCESSING METHOD
- Publication number 20120125376
- Publication date May 24, 2012
- TOKYO ELECTRON LIMITED
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PRINTED WIRING BOARD MANUFACTURING...
- Publication number 20120125765
- Publication date May 24, 2012
- TOKYO ELECTRON LIMITED
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROTARY MAGNET SPUTTERING APPARATUS
- Publication number 20120064259
- Publication date Mar 15, 2012
- TOKYO ELECTRON LIMITED
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODIALYZER
- Publication number 20120031763
- Publication date Feb 9, 2012
- Tadahiro Ohmi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LIQUID SODIUM BATTERY
- Publication number 20110300422
- Publication date Dec 8, 2011
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION APPARATUS, ION IMPLANTATION METHOD, AND SEMICONDUC...
- Publication number 20110248323
- Publication date Oct 13, 2011
- NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MAGNETRON SPUTTERING DEVICE
- Publication number 20110198219
- Publication date Aug 18, 2011
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETRON SPUTTERING METHOD, AND MAGNETRON SPUTTERING APPARATUS
- Publication number 20110186425
- Publication date Aug 4, 2011
- TOKYO ELECTRON LIMITED
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETRON, MAGNETRON CATHODE BODY MANUFACTURING METHOD, AND CATHODE...
- Publication number 20110169390
- Publication date Jul 14, 2011
- Tadahiro Ohmi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WIRING BOARD AND METHOD OF MANUFACTURING THE SAME
- Publication number 20110114375
- Publication date May 19, 2011
- Tadahiro Ohmi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PHOTOELECTRIC CONVERSION ELEMENT STRUCTURE AND SOLAR CELL
- Publication number 20110000533
- Publication date Jan 6, 2011
- NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Tadahiro Ohmi
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
ROTARY MAGNET SPUTTERING APPARATUS
- Publication number 20110000783
- Publication date Jan 6, 2011
- NATIONAL UNIVERSITY CORPORATION TOHOKU UNIVERSITY
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TOP PLATE AND PLASMA PROCESS APPARATUS EMPLOYING THE SAME
- Publication number 20100288439
- Publication date Nov 18, 2010
- TOKYO ELECTRON LIMITED
- Kiyotaka Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION ELE...
- Publication number 20100275981
- Publication date Nov 4, 2010
- TOKYO ELECTRON LIMITED
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Tetsuya Goto

Person

Patents Grantslast 30 patents

Capacitive sensor and manufacturing method of capacitive sensor

Capacitance detection area sensor and conductive pattern sensing ap...

Oxide semiconductor device and method for manufacturing same

Optical modulation element

Method of production of semiconductor device

Magnetron sputtering apparatus

Shower plate sintered integrally with gas release hole member and m...

Wiring board and method of manufacturing the same

Shower plate sintered integrally with gas release hole member and m...

Semiconductor device manufacturing method and semiconductor device

Microwave plasma processing apparatus, dielectric window for use in...

Magnetron sputtering apparatus

Rotary magnet sputtering apparatus

Rotary magnet sputtering apparatus

Ion implanting apparatus and ion implanting method

Shower plate, method for manufacturing the shower plate, plasma pro...

Shower plate, plasma processing apparatus, and product manufacturin...

Plasma processing apparatus

Method of manufacturing a semiconductor device and method of etchin...

Device and control method for micro wave plasma processing

Microwave plasma processing apparatus, microwave processing method...

Microwave plasma processing apparatus, plasma ignition method, plas...

Plasma processing device

Plasma processing device

Device and method for plasma processing, and slow-wave plate

Microwave plasma processing device, plasma processing method, and m...

Patents Applicationslast 30 patents

CAPACITIVE SENSOR AND MANUFACTURING METHOD OF CAPACITIVE SENSOR

CAPACITANCE DETECTION AREA SENSOR AND CONDUCTIVE PATTERN SENSING AP...

OPTICAL MODULATION ELEMENT

METHOD FOR MANUFACTURING OXIDE SEMICONDUCTOR DEVICE

OXIDE SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME

METHOD OF PRODUCTION OF SEMICONDUCTOR DEVICE

ELECTRODE STRUCTURE AND SECONDARY BATTERY

MAGNETRON SPUTTERING APPARATUS AND MAGNETRON SPUTTERING METHOD

SHOWER PLATE SINTERED INTEGRALLY WITH GAS RELEASE HOLE MEMBER AND M...

Ion Implantation Apparatus, Ion Implantation Method, and Semiconduc...

MAGNETRON SPUTTERING APPARATUS

METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION ELEMENTS

MULTILAYER WIRING BOARD

SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE

CATHODE BODY, FLUORESCENT TUBE, AND METHOD OF MANUFACTURING A CATHO...

SHOWER PLATE, MANUFACTURING METHOD OF THE SHOWER PLATE, AND PLASMA...

WET PROCESSING APPARATUS AND WET PROCESSING METHOD

PLASMA PROCESSING APPARATUS AND PRINTED WIRING BOARD MANUFACTURING...

ROTARY MAGNET SPUTTERING APPARATUS

ELECTRODIALYZER

LIQUID SODIUM BATTERY

ION IMPLANTATION APPARATUS, ION IMPLANTATION METHOD, AND SEMICONDUC...

MAGNETRON SPUTTERING DEVICE

MAGNETRON SPUTTERING METHOD, AND MAGNETRON SPUTTERING APPARATUS

MAGNETRON, MAGNETRON CATHODE BODY MANUFACTURING METHOD, AND CATHODE...

WIRING BOARD AND METHOD OF MANUFACTURING THE SAME

PHOTOELECTRIC CONVERSION ELEMENT STRUCTURE AND SOLAR CELL

ROTARY MAGNET SPUTTERING APPARATUS

TOP PLATE AND PLASMA PROCESS APPARATUS EMPLOYING THE SAME

APPARATUS AND METHOD FOR MANUFACTURING PHOTOELECTRIC CONVERSION ELE...