Tetsuya Hamada

Person

Shimogyo-ku, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing method
- Patent number 9,477,162
- Issue date Oct 25, 2016
- Screen Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing method
- Patent number 9,032,977
- Issue date May 19, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Tetsuya Hamada
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing apparatus
- Patent number 8,932,672
- Issue date Jan 13, 2015
- Screen Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G11 - INFORMATION STORAGE
Information Patent Grant
Substrate processing apparatus
- Patent number 8,631,809
- Issue date Jan 21, 2014
- Sokudo Co., Ltd.
- Tetsuya Hamada
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus for and method of processing substrate subjected to expos...
- Patent number 8,460,476
- Issue date Jun 11, 2013
- Sokudo Co., Ltd.
- Tetsuya Hamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature measurement in a substrate processing apparatus
- Patent number 8,122,851
- Issue date Feb 28, 2012
- Sokudo Co., Ltd.
- Tetsuya Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method usin...
- Patent number 8,015,985
- Issue date Sep 13, 2011
- Sokudo Co., Ltd.
- Tetsuya Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for and method of processing substrate subjected to expos...
- Patent number 8,012,418
- Issue date Sep 6, 2011
- Dainippon Screen Mfg. Co., Ltd.
- Tetsuya Hamada
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus
- Patent number 7,722,267
- Issue date May 25, 2010
- Sokudo Co., Ltd.
- Tetsuya Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Managing apparatus for substrate processing system
- Patent number 7,698,107
- Issue date Apr 13, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Toru Kitamoto
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Substrate processing apparatus
- Patent number 7,690,853
- Issue date Apr 6, 2010
- Sokudo Co., Ltd.
- Tetsuya Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 7,641,404
- Issue date Jan 5, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Tetsuya Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 7,512,456
- Issue date Mar 31, 2009
- Dainippon Screen Mfg. Co., Ltd.
- Tetsuya Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system managing apparatus information of subst...
- Patent number 7,460,923
- Issue date Dec 2, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Toru Kitamoto
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Substrate processing system managing apparatus information of subst...
- Patent number 7,333,867
- Issue date Feb 19, 2008
- Dainippon Screen Mfg. Co., Ltd.
- Toru Kitamoto
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Substrate processing system managing apparatus information of subst...
- Patent number 7,280,883
- Issue date Oct 9, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Toru Kitamoto
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Substrate processing system managing apparatus information of subst...
- Patent number 7,047,100
- Issue date May 16, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Toru Kitamoto
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
System for and method of processing substrate
- Patent number 6,807,455
- Issue date Oct 19, 2004
- Dainippon Screen Mfg. Co. Ltd.
- Takushi Yoshida
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Substrate processing apparatus having regulated power consumption a...
- Patent number 6,060,697
- Issue date May 9, 2000
- Dainippon Screen Mfg. Co., Ltd.
- Akihiko Morita
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing management system with recipe copying functions
- Patent number 5,867,389
- Issue date Feb 2, 1999
- Dainippon Screen Mfg. Co., Ltd.
- Tetsuya Hamada
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus and method
- Patent number 5,687,085
- Issue date Nov 11, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Toru Morimoto
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing apparatus and method
- Patent number 5,668,733
- Issue date Sep 16, 1997
- Dainippon Screen Mfg. Co., Ltd.
- Toru Morimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of and device for transporting semiconductor substrate in se...
- Patent number 5,436,848
- Issue date Jul 25, 1995
- Dainippon Screen Mfg. Co., Ltd.
- Masami Nishida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20160203997
- Publication date Jul 14, 2016
- SCREEN Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20150086923
- Publication date Mar 26, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD AND SYSTEM FOR REMOVAL OF FILMS FROM PERIPHERAL PORTIONS OF...
- Publication number 20120037593
- Publication date Feb 16, 2012
- SOKUDO CO., LTD.
- Tadashi Miyagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100202867
- Publication date Aug 12, 2010
- Dainippon Screen Mfg. Co., Ltd.
- Tetsuya HAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE SUBJECTED TO EXPOS...
- Publication number 20100126527
- Publication date May 27, 2010
- Sokudo Co., Ltd.
- Tetsuya Hamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20100075054
- Publication date Mar 25, 2010
- Sokudo Co., Ltd.
- Koji Kaneyama
- G11 - INFORMATION STORAGE
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20090173364
- Publication date Jul 9, 2009
- Sokudo Co., Ltd.
- Tetsuya Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE MEASUREMENT IN A SUBSTRATE PROCESSING APPARATUS
- Publication number 20090120362
- Publication date May 14, 2009
- SOKUDO CO., LTD.
- Tetsuya Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and system for removal of films from peripheral portions of...
- Publication number 20080226830
- Publication date Sep 18, 2008
- SOKUDO CO., LTD.
- Tadashi Miyagi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE FOR TEMPERATURE MEASUREMENT AND TEMPERATURE MEASURING SYSTEM
- Publication number 20080144695
- Publication date Jun 19, 2008
- Sokudo Co., Ltd.
- Tetsuya Hamada
- G01 - MEASURING TESTING
Information Patent Application
Substrate Processing System Managing Apparatus Information of Subst...
- Publication number 20070294058
- Publication date Dec 20, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Toru Kitamoto
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate Processing System Managing Apparatus Information of Subst...
- Publication number 20070293974
- Publication date Dec 20, 2007
- Dainippon Screen Mfg. Co., Ltd.
- Toru Kitamoto
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20070190437
- Publication date Aug 16, 2007
- Koji Kaneyama
- G11 - INFORMATION STORAGE
Information Patent Application
SUBSTRATE PROCESSING SYSTEM CAPABLE OF MONITORING OPERATION OF SUBS...
- Publication number 20070179658
- Publication date Aug 2, 2007
- Tetsuya HAMADA
- G05 - CONTROLLING REGULATING
Information Patent Application
APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE SUBJECTED TO EXPOS...
- Publication number 20070077171
- Publication date Apr 5, 2007
- Tetsuya HAMADA
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate processing apparatus
- Publication number 20060245855
- Publication date Nov 2, 2006
- DAINIPPON SCREEN MFG., CO., LTD.
- Tetsuya Hamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate processing system managing apparatus information of subst...
- Publication number 20060241803
- Publication date Oct 26, 2006
- Dainibippon Screen Mfg. Co., Ltd.
- Toru Kitamoto
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate processing system managing apparatus information of subst...
- Publication number 20060206229
- Publication date Sep 14, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Toru Kitamoto
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate processing apparatus
- Publication number 20060120716
- Publication date Jun 8, 2006
- Dainippon Screen Mfg. Co., Ltd.
- Tetsuya Hamada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System for and method of processing substrate
- Publication number 20040002784
- Publication date Jan 1, 2004
- Dainippon Screen Mfg. Co., Ltd.
- Takushi Yoshida
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate processing system managing apparatus information of subst...
- Publication number 20030046034
- Publication date Mar 6, 2003
- Dainippon Screen Mfg. Co., Ltd.
- Toru Kitamoto
- G05 - CONTROLLING REGULATING
Information Patent Application
Substrate processing system managing apparatus information of subst...
- Publication number 20030023340
- Publication date Jan 30, 2003
- Toru Kitamoto
- G05 - CONTROLLING REGULATING

Tetsuya Hamada

Person

Patents Grantslast 30 patents

Substrate processing method

Substrate processing method

Substrate processing apparatus

Substrate processing apparatus

Apparatus for and method of processing substrate subjected to expos...

Temperature measurement in a substrate processing apparatus

Substrate processing apparatus and substrate processing method usin...

Apparatus for and method of processing substrate subjected to expos...

Substrate processing apparatus

Managing apparatus for substrate processing system

Substrate processing apparatus

Substrate processing apparatus

Substrate processing apparatus

Substrate processing system managing apparatus information of subst...

Substrate processing system managing apparatus information of subst...

Substrate processing system managing apparatus information of subst...

Substrate processing system managing apparatus information of subst...

System for and method of processing substrate

Substrate processing apparatus having regulated power consumption a...

Substrate processing management system with recipe copying functions

Substrate processing apparatus and method

Substrate processing apparatus and method

Method of and device for transporting semiconductor substrate in se...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD

METHOD AND SYSTEM FOR REMOVAL OF FILMS FROM PERIPHERAL PORTIONS OF...

SUBSTRATE PROCESSING APPARATUS

APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE SUBJECTED TO EXPOS...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...

TEMPERATURE MEASUREMENT IN A SUBSTRATE PROCESSING APPARATUS

Method and system for removal of films from peripheral portions of...

SUBSTRATE FOR TEMPERATURE MEASUREMENT AND TEMPERATURE MEASURING SYSTEM

Substrate Processing System Managing Apparatus Information of Subst...

Substrate Processing System Managing Apparatus Information of Subst...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM CAPABLE OF MONITORING OPERATION OF SUBS...

APPARATUS FOR AND METHOD OF PROCESSING SUBSTRATE SUBJECTED TO EXPOS...

Substrate processing apparatus

Substrate processing system managing apparatus information of subst...

Substrate processing system managing apparatus information of subst...

Substrate processing apparatus

System for and method of processing substrate

Substrate processing system managing apparatus information of subst...

Substrate processing system managing apparatus information of subst...