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Tetsuya Hasebe
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Tokyo, JP
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last 30 patents
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Patent Grant
Switch array
Patent number
7,994,443
Issue date
Aug 9, 2011
Tokyo Electron Limited
Masato Hayashi
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
Switch Array
Publication number
20090045039
Publication date
Feb 19, 2009
Masato Hayashi
B81 - MICRO-STRUCTURAL TECHNOLOGY