Tetsuya Hasebe

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  • Tokyo, JP

Patents Grantslast 30 patents

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    • Patent number 7,994,443
    • Issue date Aug 9, 2011
    • Tokyo Electron Limited
    • Masato Hayashi
    • B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

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    • Publication number 20090045039
    • Publication date Feb 19, 2009
    • Masato Hayashi
    • B81 - MICRO-STRUCTURAL TECHNOLOGY