Tetsuya Igo

Person

  • Kyoto, JP

Patents Grantslast 30 patents

  • Information Patent Grant

    Ion beam line

    • Patent number 9,142,386
    • Issue date Sep 22, 2015
    • Nissin Ion Equipment Co., Ltd.
    • Sami K Hahto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Repeller structure and ion source

    • Patent number 8,702,920
    • Issue date Apr 22, 2014
    • Nissin Ion Equipment Co., Ltd.
    • Tadashi Ikejiri
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma generator

    • Patent number 8,664,861
    • Issue date Mar 4, 2014
    • Nissin Ion Equipment Co., Ltd.
    • Hideki Fujita
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Plasma generator

    • Patent number 8,569,955
    • Issue date Oct 29, 2013
    • Nissin Ion Equipment Co., Ltd.
    • Hideki Fujita
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Ion implanting apparatus and deflecting electrode

    • Patent number 8,389,964
    • Issue date Mar 5, 2013
    • Nissin Ion Equipment Co., Ltd.
    • Tetsuya Igo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ion source

    • Patent number 8,253,114
    • Issue date Aug 28, 2012
    • Nissin Ion Equipment Co., Ltd.
    • Takatoshi Yamashita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Ion implanting apparatus and method of correcting beam orbit

    • Patent number 7,772,573
    • Issue date Aug 10, 2010
    • Nissin Ion Equipment Co., Ltd.
    • Tetsuya Igo
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    ION BEAM LINE

    • Publication number 20140261171
    • Publication date Sep 18, 2014
    • Sami K. Hahto
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA GENERATOR

    • Publication number 20140042902
    • Publication date Feb 13, 2014
    • NISSIN ION EQUIPMENT CO., LTD.
    • Hideki FUJITA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PLASMA GENERATOR

    • Publication number 20120049738
    • Publication date Mar 1, 2012
    • NISSIN ION EQUIPMENT CO., LTD.
    • Hideki FUJITA
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    ION IMPLANTING APPARATUS AND DEFLECTING ELECTRODE

    • Publication number 20110297843
    • Publication date Dec 8, 2011
    • NISSIN ION EQUIPMENT CO., LTD.
    • Tetsuya Igo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    REPELLER STRUCTURE AND ION SOURCE

    • Publication number 20110139613
    • Publication date Jun 16, 2011
    • NISSIN ION EQUIPMENT CO., LTD.
    • Tadashi Ikejiri
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION SOURCE

    • Publication number 20100051825
    • Publication date Mar 4, 2010
    • NISSIN ION EQUIPMENT CO., LTD.
    • Takatoshi Yamashita
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    ION IMPLANTING APPARATUS AND METHOD OF CORRECTING BEAM ORBIT

    • Publication number 20090302214
    • Publication date Dec 10, 2009
    • NISSIN ION EQUIPMENT CO., LTD.
    • Tetsuya Igo
    • H01 - BASIC ELECTRIC ELEMENTS