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Tetsuya Ishikawa
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San Diego, CA, US
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last 30 patents
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Patent Grant
Nozzle
Patent number
9,544,982
Issue date
Jan 10, 2017
ASML Netherlands B.V.
Jian Zhao
F02 - COMBUSTION ENGINES HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
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Patent Grant
Apparatus for and method of supplying target material
Patent number
9,544,983
Issue date
Jan 10, 2017
ASML Netherlands B.V.
Chirag Rajyaguru
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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last 30 patents
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Patent Application
APPARATUS FOR AND METHOD OF SUPPLYING TARGET MATERIAL
Publication number
20160128170
Publication date
May 5, 2016
ASML NETHERLANDS B.V.
Chirag RAJYAGURU
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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Patent Application
NOZZLE AND METHOD OF MAKING SAME
Publication number
20150223313
Publication date
Aug 6, 2015
CYMER, LLC
JIAN ZHAO
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR