Tetsuya Kawajiri

Person

Handa-city, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Member for semiconductor manufacturing apparatuses
- Patent number 11,456,189
- Issue date Sep 27, 2022
- NGK Insulators, Ltd.
- Kazuma Ohba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Joined body including ceramic member and metallic member and method...
- Patent number 10,814,436
- Issue date Oct 27, 2020
- NGK Insulators, Ltd.
- Tomoyuki Minami
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Joined body manufacturing method and joined body
- Patent number 10,332,771
- Issue date Jun 25, 2019
- NGK Insulators, Ltd.
- Tomoyuki Minami
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Wafer holder and method for manufacturing the same
- Patent number 10,037,910
- Issue date Jul 31, 2018
- NGK Insulators, Ltd.
- Takuya Yanoh
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Bonded body of ceramic member and metal member and method for manuf...
- Patent number 9,126,384
- Issue date Sep 8, 2015
- NGK Insulators, Ltd.
- Tomoyuki Minami
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic chuck with heater and manufacturing method thereof
- Patent number 8,136,820
- Issue date Mar 20, 2012
- NGK Insulators, Ltd.
- Ikuhisa Morioka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate supporting member
- Patent number 8,129,016
- Issue date Mar 6, 2012
- NGK Insulators, Ltd.
- Tetsuya Kawajiri
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Electrostatic chuck with heater
- Patent number 7,848,075
- Issue date Dec 7, 2010
- NGK Insulators, Ltd.
- Kazuhiro Nobori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and manufacturing method for the same, and alum...
- Patent number 7,416,793
- Issue date Aug 26, 2008
- NGK Insulators, Ltd.
- Hiroto Matsuda
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method of fabricating substrate placing stage
- Patent number 7,353,979
- Issue date Apr 8, 2008
- NGK Insulators, Ltd.
- Tomoyuki Fujii
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Joined bodies and a method of producing the same
- Patent number 7,067,200
- Issue date Jun 27, 2006
- NGK Insulators, Ltd.
- Tomoyuki Fujii
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Electrostatic adsorption device
- Patent number 6,728,091
- Issue date Apr 27, 2004
- NGK Insulators, Ltd.
- Hideyoshi Tsuruta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus
- Patent number 6,432,208
- Issue date Aug 13, 2002
- Tokyo Electron Limited
- Satoru Kawakami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Equipment for holding a semiconductor wafer, a method for manufactu...
- Patent number 6,292,346
- Issue date Sep 18, 2001
- NGK Insulators, Ltd.
- Masashi Ohno
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
JOINED BODY INCLUDING CERAMIC MEMBER AND METALLIC MEMBER AND METHOD...
- Publication number 20170036961
- Publication date Feb 9, 2017
- NGK Insulators, Ltd.
- Tomoyuki MINAMI
- B32 - LAYERED PRODUCTS
Information Patent Application
JOINED BODY MANUFACTURING METHOD
- Publication number 20160368829
- Publication date Dec 22, 2016
- NGK Insulators, Ltd.
- Tomoyuki MINAMI
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
JOINED BODY MANUFACTURING METHOD AND JOINED BODY
- Publication number 20160358801
- Publication date Dec 8, 2016
- NGK Insulators, Ltd.
- Tomoyuki MINAMI
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Application
WAFER HOLDER AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20160196999
- Publication date Jul 7, 2016
- NGK Insulators, Ltd.
- Takuya YANOH
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUSES
- Publication number 20140272421
- Publication date Sep 18, 2014
- NGK Insulators, Ltd.
- Kazuma OHBA
- B32 - LAYERED PRODUCTS
Information Patent Application
BONDED BODY OF CERAMIC MEMBER AND METAL MEMBER AND METHOD FOR MANUF...
- Publication number 20140127484
- Publication date May 8, 2014
- NGK Insulators, Ltd.
- Tomoyuki MINAMI
- B32 - LAYERED PRODUCTS
Information Patent Application
ELECTROSTATIC CHUCK WITH HEATER
- Publication number 20080266745
- Publication date Oct 30, 2008
- NGK Insulators, Ltd.
- Kazuhiro Nobori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING THE SAME
- Publication number 20080186647
- Publication date Aug 7, 2008
- NGK Insulators, Ltd.
- Tetsuya KAWAJIRI
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SUBSTRATE SUPPORTING MEMBER
- Publication number 20080138645
- Publication date Jun 12, 2008
- NGK Insulators, Ltd.
- Tetsuya KAWAJIRI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK WITH HEATER AND MANUFACTURING METHOD THEREOF
- Publication number 20080049374
- Publication date Feb 28, 2008
- NGK Insulators, Ltd.
- Ikuhisa Morioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK
- Publication number 20070146961
- Publication date Jun 28, 2007
- NGK Insulators, Ltd.
- Ikuhisa Morioka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic chuck and method of manufacturing electrostatic chuck
- Publication number 20060213900
- Publication date Sep 28, 2006
- NGK Insulators, Ltd.
- Hiroto Matsuda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Substrate mounting apparatus and control method of substrate temper...
- Publication number 20060021705
- Publication date Feb 2, 2006
- NGK Insulators, Ltd.
- Yasuyoshi Imai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrostatic chuck and manufacturing method for the same, and alum...
- Publication number 20050152089
- Publication date Jul 14, 2005
- NGK Insulators, Ltd.
- Hiroto Matsuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of fabricating substrate placing stage
- Publication number 20050118450
- Publication date Jun 2, 2005
- NGK Insulators, Ltd.
- Tomoyuki Fujii
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Joined bodies and a method of producing the same
- Publication number 20040016792
- Publication date Jan 29, 2004
- NGK Insulators, Ltd.
- Tomoyuki Fujii
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Electrostatic adsorption device
- Publication number 20030059627
- Publication date Mar 27, 2003
- NGK Insulators, Ltd.
- Hideyoshi Tsuruta
- H01 - BASIC ELECTRIC ELEMENTS

Tetsuya Kawajiri

Person

Patents Grantslast 30 patents

Member for semiconductor manufacturing apparatuses

Joined body including ceramic member and metallic member and method...

Joined body manufacturing method and joined body

Wafer holder and method for manufacturing the same

Bonded body of ceramic member and metal member and method for manuf...

Electrostatic chuck with heater and manufacturing method thereof

Substrate supporting member

Electrostatic chuck with heater

Electrostatic chuck and manufacturing method for the same, and alum...

Method of fabricating substrate placing stage

Joined bodies and a method of producing the same

Electrostatic adsorption device

Plasma processing apparatus

Equipment for holding a semiconductor wafer, a method for manufactu...

Patents Applicationslast 30 patents

JOINED BODY INCLUDING CERAMIC MEMBER AND METALLIC MEMBER AND METHOD...

JOINED BODY MANUFACTURING METHOD

JOINED BODY MANUFACTURING METHOD AND JOINED BODY

WAFER HOLDER AND METHOD FOR MANUFACTURING THE SAME

MEMBER FOR SEMICONDUCTOR MANUFACTURING APPARATUSES

BONDED BODY OF CERAMIC MEMBER AND METAL MEMBER AND METHOD FOR MANUF...

ELECTROSTATIC CHUCK WITH HEATER

ELECTROSTATIC CHUCK AND METHOD OF MANUFACTURING THE SAME

SUBSTRATE SUPPORTING MEMBER

ELECTROSTATIC CHUCK WITH HEATER AND MANUFACTURING METHOD THEREOF

ELECTROSTATIC CHUCK

Electrostatic chuck and method of manufacturing electrostatic chuck

Substrate mounting apparatus and control method of substrate temper...

Electrostatic chuck and manufacturing method for the same, and alum...

Method of fabricating substrate placing stage

Joined bodies and a method of producing the same

Electrostatic adsorption device