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Tetsuya Kobaru
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Tokyo, JP
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last 30 patents
Information
Patent Grant
Substrate transporting device
Patent number
5,951,283
Issue date
Sep 14, 1999
Kabushiki Kaisha Shinkawa
Hiroshi Ushiki
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Wafer conveying apparatus
Patent number
5,848,868
Issue date
Dec 15, 1998
Kabushiki Kaisha Shinkawa
Yasunobu Suzuki
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Lead frame baking oven
Patent number
5,647,740
Issue date
Jul 15, 1997
Kabushiki Kaisha Shinkawa
Tetsuya Kobaru
F27 - FURNACES KILNS OVENS RETORTS