Tetsuya Marubayashi

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and maintenance method therefor
- Patent number 6,332,898
- Issue date Dec 25, 2001
- Kokusai Electric Co., Ltd.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and maintenance method therefor
- Patent number 6,143,040
- Issue date Nov 7, 2000
- Kokusai Electric Co., Ltd.
- Kouji Tometsuka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...