Tetsuya MARUBAYASHI

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Toyama-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
End effector for handling wafers
- Patent number D997892
- Issue date Sep 5, 2023
- Kokusai Electric Corporation
- Satoshi Aizawa
- D13 - Equipment for production, distribution, or transformation of energy
Information Patent Grant
Reaction tube structure and substrate processing apparatus
- Patent number 11,359,283
- Issue date Jun 14, 2022
- Kokusai Electric Corporation
- Tetsuya Marubayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 8,071,477
- Issue date Dec 6, 2011
- Hitachi Kokusai Electric Inc.
- Atsushi Moriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 8,070,880
- Issue date Dec 6, 2011
- Hitachi Kokusai Electric, Inc.
- Tetsuya Marubayashi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
REACTION TUBE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20200312631
- Publication date Oct 1, 2020
- Kokusai Electric Corporation
- Tetsuya MARUBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTION TUBE STRUCTURE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20180142353
- Publication date May 24, 2018
- Hitachi Kokusai Electric Inc.
- Tetsuya MARUBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20100151682
- Publication date Jun 17, 2010
- Hitachi Kokusai Electric Inc.
- Atsushi MORIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus
- Publication number 20100058984
- Publication date Mar 11, 2010
- Tetsuya Marubayashi
- C30 - CRYSTAL GROWTH
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20090116936
- Publication date May 7, 2009
- Hitachi Kokusai Electric Inc.
- Tetsuya MARUBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS