Tetsuya Mori

Person

Tochigi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Exposure apparatus and device manufacturing method
- Patent number 8,130,360
- Issue date Mar 6, 2012
- Canon Kabushiki Kaisha
- Shinichiro Hirai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method using the same
- Patent number 7,626,680
- Issue date Dec 1, 2009
- Canon Kabushiki Kaisha
- Tetsuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reference plate, exposure apparatus, device manufacturing system, d...
- Patent number 6,608,666
- Issue date Aug 19, 2003
- Canon Kabushiki Kaisha
- Nobuyoshi Deguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light source device and illumination system
- Patent number 6,280,062
- Issue date Aug 28, 2001
- Canon Kabushiki Kaisha
- Tetsuya Mori
- G02 - OPTICS
Information Patent Grant
Exposure apparatus, and manufacturing method for devices using same
- Patent number 6,268,902
- Issue date Jul 31, 2001
- Canon Kabushiki Kaisha
- Tetsuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning method and projection exposure apparatus using the method
- Patent number 6,091,481
- Issue date Jul 18, 2000
- Canon Kabushiki Kaisha
- Tetsuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus and microdevice manufacturing method...
- Patent number 5,999,270
- Issue date Dec 7, 1999
- Canon Kabushiki Kaisha
- Tetsuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light source device and illumination system
- Patent number 5,971,577
- Issue date Oct 26, 1999
- Canon Kabushiki Kaisha
- Tetsuya Mori
- G02 - OPTICS
Information Patent Grant
Method of measuring exposure condition and/or aberration of project...
- Patent number 5,814,425
- Issue date Sep 29, 1998
- Canon Kabushiki Kaisha
- Yoshiharu Kataoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method wherein alignment is carried out by c...
- Patent number 5,751,404
- Issue date May 12, 1998
- Canon Kabushiki Kaisha
- Eiichi Murakami
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Position detecting method and projection exposure apparatus using t...
- Patent number 5,594,549
- Issue date Jan 14, 1997
- Canon Kabushiki Kaisha
- Tetsuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment and exposure method
- Patent number 5,331,371
- Issue date Jul 19, 1994
- Canon Kabushiki Kaisha
- Tetsuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus
- Patent number 5,309,197
- Issue date May 3, 1994
- Canon Kabushiki Kaisha
- Tetsuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of positioning a wafer with respect to a focal plane of an o...
- Patent number 5,268,744
- Issue date Dec 7, 1993
- Canon Kabushiki Kaisha
- Tetsuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Alignment system
- Patent number 5,166,754
- Issue date Nov 24, 1992
- Canon Kabushiki Kaisha
- Akiyoshi Suzuki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD USING THE SAME
- Publication number 20080252869
- Publication date Oct 16, 2008
- Tetsuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20080036990
- Publication date Feb 14, 2008
- Canon Kabushiki Kaisha
- Shinichiro Hirai
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Exposure apparatus and device fabrication method using the same
- Publication number 20050052633
- Publication date Mar 10, 2005
- Tetsuya Mori
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Reference plate, exposure apparatus, device manufacturing system, d...
- Publication number 20020067473
- Publication date Jun 6, 2002
- Nobuyoshi Deguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tetsuya Mori

Person

Patents Grantslast 30 patents

Exposure apparatus and device manufacturing method

Exposure apparatus and device fabrication method using the same

Reference plate, exposure apparatus, device manufacturing system, d...

Light source device and illumination system

Exposure apparatus, and manufacturing method for devices using same

Positioning method and projection exposure apparatus using the method

Projection exposure apparatus and microdevice manufacturing method...

Light source device and illumination system

Method of measuring exposure condition and/or aberration of project...

Exposure apparatus and method wherein alignment is carried out by c...

Position detecting method and projection exposure apparatus using t...

Alignment and exposure method

Projection exposure apparatus

Method of positioning a wafer with respect to a focal plane of an o...

Alignment system

Patents Applicationslast 30 patents

EXPOSURE APPARATUS AND DEVICE FABRICATION METHOD USING THE SAME

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

Exposure apparatus and device fabrication method using the same

Reference plate, exposure apparatus, device manufacturing system, d...