Tetsuya Nakano

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Nirasaki-shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Film forming apparatus, film forming method, program and storage me...
- Patent number 7,713,886
- Issue date May 11, 2010
- Tokyo Electron Limited
- Hirokatsu Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ozone-processing apparatus for semiconductor process system
- Patent number 6,224,934
- Issue date May 1, 2001
- Tokyo Electron Limited
- Masaaki Hasei
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMING APPARATUS, FILM FORMING METHOD, PROGRAM AND STORAGE ME...
- Publication number 20070204147
- Publication date Aug 30, 2007
- TOKYO ELECTRON LIMITED
- Hirokatsu Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...