TREA

Tetsuya Nishiara

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  • Yokohama-shi, JP
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma etching method
    • Patent number 6,488,863
    • Issue date Dec 3, 2002
    • Tokyo Electron Limited
    • Koichi Yatsuda
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

  • Information Patent Application

    Plasma etching method
    • Publication number 20020084254
    • Publication date Jul 4, 2002
    • TOKYO ELECTRON LIMITED
    • Koichi Yatsuda
    • H01 - BASIC ELECTRIC ELEMENTS