Tetsuya NIYA

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Chiba, JP

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Patents Grantslast 30 patents

Information Patent Grant
Plasma processing apparatus and method
- Patent number 8,896,210
- Issue date Nov 25, 2014
- Tokyo Electron Limited
- Masaru Nishino
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
MANUFACTURING METHOD FOR COMPONENT IN PLASMA PROCESSING APPARATUS
- Publication number 20170233860
- Publication date Aug 17, 2017
- TOKYO ELECTRON LIMITED
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPONENT FOR PLASMA PROCESSING APPARATUS, AND MANUFACTURING METHOD...
- Publication number 20160076129
- Publication date Mar 17, 2016
- TOKYO ELECTRON LIMITED
- Nobuyuki Nagayama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD
- Publication number 20130162142
- Publication date Jun 27, 2013
- TOCALO CO., LTD.
- Masaru NISHINO
- H01 - BASIC ELECTRIC ELEMENTS