Tetsuya OHISHI

Follow

Person

Miyagi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 11,251,052
- Issue date Feb 15, 2022
- Tokyo Electron Limited
- Naotsugu Hoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning a substrate processing apparatus and the substra...
- Patent number 10,944,051
- Issue date Mar 9, 2021
- Tokyo Electron Limited
- Takuya Kubo
- G11 - INFORMATION STORAGE
Information Patent Grant
Method of cleaning and method of plasma processing
- Patent number 10,403,814
- Issue date Sep 3, 2019
- Tokyo Electron Limited
- Takuya Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing method
- Patent number 9,139,901
- Issue date Sep 22, 2015
- Tokyo Electron Limited
- Akitaka Shimizu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF CLEANING A SUBSTRATE PROCESSING APPARATUS AND THE SUBSTRA...
- Publication number 20190355901
- Publication date Nov 21, 2019
- TOKYO ELECTRON LIMITED
- Takuya KUBO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS
- Publication number 20190006188
- Publication date Jan 3, 2019
- TOKYO ELECTRON LIMITED
- Naotsugu HOSHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF CLEANING AND METHOD OF PLASMA PROCESSING
- Publication number 20180301622
- Publication date Oct 18, 2018
- TOKYO ELECTRON LIMITED
- Takuya KUBO
- G11 - INFORMATION STORAGE
Information Patent Application
PLASMA PROCESSING METHOD
- Publication number 20150083580
- Publication date Mar 26, 2015
- TOKYO ELECTRON LIMITED
- Akitaka SHIMIZU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...