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Tetsuya Saito

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  • Nirasaki-Shi, JP
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    FILM FORMING APPARATUS AND FILM FORMING METHOD
    • Publication number 20210388493
    • Publication date Dec 16, 2021
    • TOKYO ELECTRON LIMITED
    • Yuta SORITA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Gas supply system and proessing system
    • Publication number 20090133755
    • Publication date May 28, 2009
    • Shigeru Kasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate heating apparatus and purging method thereof
    • Publication number 20080163818
    • Publication date Jul 10, 2008
    • Tetsuya Saito
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Gas supply system and processing system
    • Publication number 20070163713
    • Publication date Jul 19, 2007
    • Shigeru Kasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Gas Supplying unit and substrate processing apparatus
    • Publication number 20070131168
    • Publication date Jun 14, 2007
    • Hisashi Gomi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vacuum processing apparatus
    • Publication number 20060160359
    • Publication date Jul 20, 2006
    • TOKYO ELECTRON LIMITED
    • Shigeru Kasai
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Vacuum treating device with lidded treatment container
    • Publication number 20060099053
    • Publication date May 11, 2006
    • TOKYO ELECTRON LIMITED
    • Tetsuya Saito
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    Substrate heating device and method of purging the device
    • Publication number 20040149227
    • Publication date Aug 5, 2004
    • Tetsuya Saito
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...