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Tetsuya Saitou

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Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing apparatus and substrate delivery method
    • Patent number 11,664,266
    • Issue date May 30, 2023
    • Tokyo Electron Limited
    • Yuichiro Wagatsuma
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus and substrate processing method
    • Patent number 11,527,404
    • Issue date Dec 13, 2022
    • Tokyo Electron Limited
    • Tetsuya Saitou
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Plasma processing apparatus
    • Patent number 11,335,542
    • Issue date May 17, 2022
    • TOKYO ELECRON LIMITED
    • Tetsuya Saitou
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Film-forming apparatus
    • Patent number 11,236,423
    • Issue date Feb 1, 2022
    • Tokyo Electron Limited
    • Takashi Kamio
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film forming apparatus
    • Patent number 9,885,114
    • Issue date Feb 6, 2018
    • Tokyo Electron Limited
    • Tetsuya Saitou
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Film-forming apparatus
    • Patent number 9,441,293
    • Issue date Sep 13, 2016
    • Tokyo Electron Limited
    • Tetsuya Saitou
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    PLASMA PROCESSING APPARATUS
    • Publication number 20210013004
    • Publication date Jan 14, 2021
    • TOKYO ELECTRON LIMITED
    • Tetsuya SAITOU
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE DELIVERY METHOD
    • Publication number 20210005505
    • Publication date Jan 7, 2021
    • TOKYO ELECTRON LIMITED
    • Yuichiro WAGATSUMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    STAGE, SUBSTRATE PROCESSING APPARATUS AND STAGE ASSEMBLING METHOD
    • Publication number 20210005502
    • Publication date Jan 7, 2021
    • TOKYO ELECTRON LIMITED
    • Yuichiro WAGATSUMA
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS
    • Publication number 20200335385
    • Publication date Oct 22, 2020
    • TOKYO ELECTRON LIMITED
    • Tetsuya SAITOU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
    • Publication number 20200294799
    • Publication date Sep 17, 2020
    • TOKYO ELECTRON LIMITED
    • Tetsuya SAITOU
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Film-Forming Apparatus and Film-Forming Method
    • Publication number 20200208267
    • Publication date Jul 2, 2020
    • TOKYO ELECTRON LIMITED
    • Takashi KAMIO
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20150267298
    • Publication date Sep 24, 2015
    • TOKYO ELECTRON LIMITED
    • Tetsuya SAITOU
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM-FORMING APPARATUS
    • Publication number 20150047567
    • Publication date Feb 19, 2015
    • TOKYO ELECTRON LIMITED
    • Tetsuya Saitou
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    FILM FORMING APPARATUS
    • Publication number 20140090599
    • Publication date Apr 3, 2014
    • TOKYO ELECTRON LIMITED
    • Tetsuya SAITOU
    • B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...