Tetsuya SAKAZAKI

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Nirasaki City, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, substrate processing method, and ch...
- Patent number 11,545,367
- Issue date Jan 3, 2023
- Tokyo Electron Limited
- Tetsuya Sakazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method, substrate processing device and etchin...
- Patent number 11,306,249
- Issue date Apr 19, 2022
- Tokyo Electron Limited
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liquid processing method, liquid processing apparatus and storage m...
- Patent number 9,111,967
- Issue date Aug 18, 2015
- Tokyo Electron Limited
- Kenji Sekiguchi
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CH...
- Publication number 20230041889
- Publication date Feb 9, 2023
- TOKYO ELECTRON LIMITED
- Tetsuya SAKAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND ETCHING LIQUID
- Publication number 20220213382
- Publication date Jul 7, 2022
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND CH...
- Publication number 20210233780
- Publication date Jul 29, 2021
- TOKYO ELECTRON LIMITED
- Tetsuya SAKAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD, SUBSTRATE PROCESSING DEVICE AND ETCHIN...
- Publication number 20210032537
- Publication date Feb 4, 2021
- TOKYO ELECTRON LIMITED
- Koukichi Hiroshiro
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
LIQUID PROCESSING METHOD, LIQUID PROCESSING APPARATUS AND STORAGE M...
- Publication number 20120260949
- Publication date Oct 18, 2012
- Kenji SEKIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS