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Tetsuya Sawahata
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Hitachinaka, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Charged particle radiation device with bandpass detection
Patent number
9,202,667
Issue date
Dec 1, 2015
Hitachi High-Technologies Corporation
Michio Hatano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam apparatus
Patent number
8,629,395
Issue date
Jan 14, 2014
Hitachi High-Technologies Corporation
Hideo Morishita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Scanning electron microscope
Patent number
7,705,302
Issue date
Apr 27, 2010
Hitachi High-Technologies Corporation
Yasuko Aoki
G01 - MEASURING TESTING
Information
Patent Grant
Scanning electron microscope and sample observation method using th...
Patent number
6,855,931
Issue date
Feb 15, 2005
Hitachi, Ltd.
Tetsuya Sawahata
G01 - MEASURING TESTING
Information
Patent Grant
Scanning electron microscope and sample observation method using th...
Patent number
6,740,877
Issue date
May 25, 2004
Hitachi, Ltd.
Tetsuya Sawahata
G01 - MEASURING TESTING
Information
Patent Grant
Scanning electron microscope and sample observation method using th...
Patent number
6,555,816
Issue date
Apr 29, 2003
Hitachi, Ltd.
Tetsuya Sawahata
G01 - MEASURING TESTING
Information
Patent Grant
Scanning electron microscope
Patent number
6,501,077
Issue date
Dec 31, 2002
Hitachi, Ltd.
Tetsuya Sawahata
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE RADIATION DEVICE
Publication number
20130043388
Publication date
Feb 21, 2013
Hitachi High-Technologies Corporation
Michio Hatano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Apparatus
Publication number
20120298864
Publication date
Nov 29, 2012
Hideo Morishita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Scanning Electron Microscope
Publication number
20080191135
Publication date
Aug 14, 2008
Hitachi High-Technologies Corporation
Yasuko Aoki
G01 - MEASURING TESTING
Information
Patent Application
Scanning electron microscope and sample observation method using th...
Publication number
20040183016
Publication date
Sep 23, 2004
Hitachi, Ltd
Tetsuya Sawahata
G01 - MEASURING TESTING
Information
Patent Application
Scanning electron microscope and sample observation method using th...
Publication number
20030189172
Publication date
Oct 9, 2003
Hitachi, Ltd
Tetsuya Sawahata
G01 - MEASURING TESTING