Tetsuya Shibata

Person

Nirasaki-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Method for removing metal impurity from quartz component part used...
- Patent number 8,834,817
- Issue date Sep 16, 2014
- Tokyo Electron Limited
- Masahisa Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method, film formation apparatus, and method for usi...
- Patent number 8,338,312
- Issue date Dec 25, 2012
- Tokyo Electron Limited
- Jun Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and method of manufacturing the same
- Patent number 8,129,775
- Issue date Mar 6, 2012
- Tokyo Electron Limited
- Koji Akiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation method and apparatus for forming silicon-containing...
- Patent number 8,034,673
- Issue date Oct 11, 2011
- Tokyo Electron Limited
- Kentaro Kadonaga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Memory apparatus
- Patent number 7,994,562
- Issue date Aug 9, 2011
- Tokyo Electron Limited
- Hajime Nakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film formation method and apparatus for semiconductor process
- Patent number 7,981,809
- Issue date Jul 19, 2011
- Tokyo Electron Limited
- Tetsuya Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing polysilazane film
- Patent number 7,879,397
- Issue date Feb 1, 2011
- Tokyo Electron Limited
- Masahisa Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Baking method of quartz products, computer program and storage medium
- Patent number 7,829,475
- Issue date Nov 9, 2010
- Tokyo Electron Limited
- Katsuhiko Anbai
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Heat processing method and apparatus for semiconductor process
- Patent number 7,605,095
- Issue date Oct 20, 2009
- Tokyo Electron Limited
- Toshiyuki Ikeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
FILM FORMATION METHOD, FILM FORMATION APPARATUS, AND METHOD FOR USI...
- Publication number 20110201210
- Publication date Aug 18, 2011
- TOKYO ELECTRON LIMITED
- Jun Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20100148241
- Publication date Jun 17, 2010
- TOKYO ELECTRON LIMITED
- Koji AKIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for removing metal impurity from quartz component part used...
- Publication number 20100135877
- Publication date Jun 3, 2010
- Masahisa Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEMORY APPARATUS
- Publication number 20100013000
- Publication date Jan 21, 2010
- TOKYO ELECTRON LIMITED
- Hajime NAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION METHOD AND APPARATUS FOR FORMING SILICON-CONTAINING...
- Publication number 20090263975
- Publication date Oct 22, 2009
- TOKYO ELECTRON LIMITED
- Kentaro KADONAGA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for removing metal impurity from quartz component part used...
- Publication number 20090041650
- Publication date Feb 12, 2009
- Masahisa Watanabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heat processing method and apparatus for semiconductor process
- Publication number 20080200038
- Publication date Aug 21, 2008
- Toshiyuki Ikeuchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for processing polysilazane film
- Publication number 20080139001
- Publication date Jun 12, 2008
- Masahisa Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Baking method of quartz products, computer program and storage medium
- Publication number 20070298621
- Publication date Dec 27, 2007
- TOKYO ELECTRON LIMITED
- Katsuhiko Anbai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Quartz products and heat treatment apparatus
- Publication number 20070297955
- Publication date Dec 27, 2007
- TOKYO ELECTRON LIMITED
- Katsuhiko Anbai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film formation method and apparatus for semiconductor process
- Publication number 20060128161
- Publication date Jun 15, 2006
- Tetsuya Shibata
- H01 - BASIC ELECTRIC ELEMENTS

Tetsuya Shibata

Person

Patents Grantslast 30 patents

Method for removing metal impurity from quartz component part used...

Film formation method, film formation apparatus, and method for usi...

Semiconductor device and method of manufacturing the same

Film formation method and apparatus for forming silicon-containing...

Memory apparatus

Film formation method and apparatus for semiconductor process

Method for processing polysilazane film

Baking method of quartz products, computer program and storage medium

Heat processing method and apparatus for semiconductor process

Patents Applicationslast 30 patents

FILM FORMATION METHOD, FILM FORMATION APPARATUS, AND METHOD FOR USI...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME

Method for removing metal impurity from quartz component part used...

MEMORY APPARATUS

FILM FORMATION METHOD AND APPARATUS FOR FORMING SILICON-CONTAINING...

Method for removing metal impurity from quartz component part used...

Heat processing method and apparatus for semiconductor process

Method for processing polysilazane film

Baking method of quartz products, computer program and storage medium

Quartz products and heat treatment apparatus

Film formation method and apparatus for semiconductor process