Tetsuya Takagaki

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Dry etching gas
- Patent number 6,514,425
- Issue date Feb 4, 2003
- Agency of Industrial Science & Technology
- Akira Sekiya
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Method and apparatus for processing substrates
- Publication number 20070062646
- Publication date Mar 22, 2007
- Hitachi Kokusai Electric Inc.
- Unryu Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for processing substrates
- Publication number 20020036066
- Publication date Mar 28, 2002
- Hitachi Kokusai Electric Inc.,
- Unryu Ogawa
- H01 - BASIC ELECTRIC ELEMENTS