Tetsuya Takagaki

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Tokorozawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Dry etching method
- Patent number 6,383,403
- Issue date May 7, 2002
- Japan as represented by the Director General of the Agency of Industrial Scie...
- Akira Sekiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas composition for dry etching and process of dry etching
- Patent number 6,322,715
- Issue date Nov 27, 2001
- Japan as represented by Director General of the Agency of Industrial Science...
- Akira Sekiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for performing heat treatment on semiconductor...
- Patent number 5,001,327
- Issue date Mar 19, 1991
- Hitachi, Ltd.
- Shigeki Hirasawa
- H01 - BASIC ELECTRIC ELEMENTS