Tetsuya Tatsumi

Person

Kanagawa, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Dry etching equipment and method for producing semiconductor device
- Patent number 10,998,174
- Issue date May 4, 2021
- SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Nobuyuki Kuboi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching characteristic estimation method, program, information proc...
- Patent number 10,403,516
- Issue date Sep 3, 2019
- SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Nobuyuki Kuboi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Simulator, processing system, damage evaluation method and damage e...
- Patent number 9,411,914
- Issue date Aug 9, 2016
- Sony Corporation
- Nobuyuki Kuboi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Predicting ultraviolet ray damage with visible wavelength spectrosc...
- Patent number 9,287,097
- Issue date Mar 15, 2016
- Sony Corporation
- Nobuyuki Kuboi
- G01 - MEASURING TESTING
Information Patent Grant
Shape simulation apparatus, shape simulation program, semiconductor...
- Patent number 8,747,685
- Issue date Jun 10, 2014
- Sony Corporation
- Nobuyuki Kuboi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Solid-state imaging device, fabrication method thereof, imaging app...
- Patent number 8,685,856
- Issue date Apr 1, 2014
- Sony Corporation
- Kensaku Maeda
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Semiconductor manufacturing device, semiconductor device manufactur...
- Patent number 8,649,893
- Issue date Feb 11, 2014
- Sony Corporation
- Nobuyuki Kuboi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shape simulation apparatus, shape simulation program, semiconductor...
- Patent number 8,535,550
- Issue date Sep 17, 2013
- Sony Corporation
- Nobuyuki Kuboi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Dry etching method and production method of magnetic memory device
- Patent number 7,808,026
- Issue date Oct 5, 2010
- Sony Corporation
- Toshiaki Shiraiwa
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Dry etching method and production method of magnetic memory device
- Patent number 7,473,646
- Issue date Jan 6, 2009
- Sony Corporation
- Toshiaki Shiraiwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma monitoring method, plasma processing method, method of manuf...
- Patent number 7,439,068
- Issue date Oct 21, 2008
- Sony Corporation
- Tetsuya Tatsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing sidewall protective film
- Patent number 5,660,681
- Issue date Aug 26, 1997
- Sony Corporation
- Seiichi Fukuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of producing semiconductor device
- Patent number 5,378,311
- Issue date Jan 3, 1995
- Sony Corporation
- Tetsuji Nagayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method for W polycide using sulfur deposition
- Patent number 5,368,686
- Issue date Nov 29, 1994
- Sony Corporation
- Tetsuya Tatsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method
- Patent number 5,362,361
- Issue date Nov 8, 1994
- Sony Corporation
- Tetsuya Tatsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method
- Patent number 5,354,421
- Issue date Oct 11, 1994
- Sony Corporation
- Tetsuya Tatsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method
- Patent number 5,266,154
- Issue date Nov 30, 1993
- Sony Corporation
- Tetsuya Tatsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device using an isopropyl a...
- Patent number 5,227,341
- Issue date Jul 13, 1993
- Sony Corporation
- Yukihiro Kamide
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dry etching method by sulfur conditioning
- Patent number 5,211,790
- Issue date May 18, 1993
- Sony Corporation
- Tetsuya Tatsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching process of silicon material
- Patent number 5,200,028
- Issue date Apr 6, 1993
- Sony Corporation
- Tetsuya Tatsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dry etching method
- Patent number 5,180,464
- Issue date Jan 19, 1993
- Sony Corporation
- Tetsuya Tatsumi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ETCHING CHARACTERISTIC ESTIMATION METHOD, PROGRAM, INFORMATION PROC...
- Publication number 20170207107
- Publication date Jul 20, 2017
- Sony Semiconductor Solutions Corporation
- Nobuyuki KUBOI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SHAPE SIMULATION APPARATUS, SHAPE SIMULATION PROGRAM, SEMICONDUCTOR...
- Publication number 20130337584
- Publication date Dec 19, 2013
- SONY CORPORATION
- Nobuyuki Kuboi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SIMULATION METHOD, SIMULATION PROGRAM, AND SEMICONDUCTOR MANUFACTUR...
- Publication number 20130133832
- Publication date May 30, 2013
- SONY CORPORATION
- Nobuyuki Kuboi
- G01 - MEASURING TESTING
Information Patent Application
SIMULATOR, PROCESSING SYSTEM, DAMAGE EVALUATION METHOD AND DAMAGE E...
- Publication number 20120158379
- Publication date Jun 21, 2012
- SONY CORPORATION
- Nobuyuki Kuboi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR MANUFACTURING DEVICE, SEMICONDUCTOR DEVICE MANUFACTUR...
- Publication number 20110160889
- Publication date Jun 30, 2011
- SONY CORPORATION
- Nobuyuki Kuboi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHAPE SIMULATION APPARATUS, SHAPE SIMULATION PROGRAM, SEMICONDUCTOR...
- Publication number 20110082577
- Publication date Apr 7, 2011
- SONY CORPORATION
- Nobuyuki Kuboi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SOLID-STATE IMAGING DEVICE, FABRICATION METHOD THEREOF, IMAGING APP...
- Publication number 20100244169
- Publication date Sep 30, 2010
- SONY CORPORATION
- Kensaku Maeda
- G02 - OPTICS
Information Patent Application
DRY ETCHING EQUIPMENT AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE
- Publication number 20090162950
- Publication date Jun 25, 2009
- SONY CORPORATION
- Nobuyuki Kuboi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dry etching method and production method of magnetic memory device
- Publication number 20080286883
- Publication date Nov 20, 2008
- SONY CORPORATION
- Toshiaki Shiraiwa
- B82 - NANO-TECHNOLOGY
Information Patent Application
PATTERN FORMING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DE...
- Publication number 20070298615
- Publication date Dec 27, 2007
- Nobuyuki Matsuzawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Dry etching process and method for manufacturing magnetic memory de...
- Publication number 20070026681
- Publication date Feb 1, 2007
- SONY CORPORATION
- Toshiaki Shiraiwa
- B82 - NANO-TECHNOLOGY
Information Patent Application
Plasma etching method
- Publication number 20050247672
- Publication date Nov 10, 2005
- Tetsuya Tatsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma monitoring method, plasma processing method, method of manuf...
- Publication number 20050019962
- Publication date Jan 27, 2005
- Sony Coporation
- Tetsuya Tatsumi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Tetsuya Tatsumi

Person

Patents Grantslast 30 patents

Dry etching equipment and method for producing semiconductor device

Etching characteristic estimation method, program, information proc...

Simulator, processing system, damage evaluation method and damage e...

Predicting ultraviolet ray damage with visible wavelength spectrosc...

Shape simulation apparatus, shape simulation program, semiconductor...

Solid-state imaging device, fabrication method thereof, imaging app...

Semiconductor manufacturing device, semiconductor device manufactur...

Shape simulation apparatus, shape simulation program, semiconductor...

Dry etching method and production method of magnetic memory device

Dry etching method and production method of magnetic memory device

Plasma monitoring method, plasma processing method, method of manuf...

Method for removing sidewall protective film

Method of producing semiconductor device

Dry etching method for W polycide using sulfur deposition

Dry etching method

Dry etching method

Dry etching method

Method of manufacturing a semiconductor device using an isopropyl a...

Dry etching method by sulfur conditioning

Etching process of silicon material

Dry etching method

Patents Applicationslast 30 patents

ETCHING CHARACTERISTIC ESTIMATION METHOD, PROGRAM, INFORMATION PROC...

SHAPE SIMULATION APPARATUS, SHAPE SIMULATION PROGRAM, SEMICONDUCTOR...

SIMULATION METHOD, SIMULATION PROGRAM, AND SEMICONDUCTOR MANUFACTUR...

SIMULATOR, PROCESSING SYSTEM, DAMAGE EVALUATION METHOD AND DAMAGE E...

SEMICONDUCTOR MANUFACTURING DEVICE, SEMICONDUCTOR DEVICE MANUFACTUR...

SHAPE SIMULATION APPARATUS, SHAPE SIMULATION PROGRAM, SEMICONDUCTOR...

SOLID-STATE IMAGING DEVICE, FABRICATION METHOD THEREOF, IMAGING APP...

DRY ETCHING EQUIPMENT AND METHOD FOR PRODUCING SEMICONDUCTOR DEVICE

Dry etching method and production method of magnetic memory device

PATTERN FORMING METHOD AND METHOD OF MANUFACTURING SEMICONDUCTOR DE...

Dry etching process and method for manufacturing magnetic memory de...

Plasma etching method

Plasma monitoring method, plasma processing method, method of manuf...