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Tetsuya TERADA
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Tokyo, JP
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last 30 patents
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Patent Grant
Apparatus for polishing, processing system, and method of polishing
Patent number
12,179,312
Issue date
Dec 31, 2024
Ebara Corporation
Takuya Moriura
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
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Patent Application
METHOD OF INFLATING ELASTIC MEMBRANE OF POLISHING HEAD, AND POLISHI...
Publication number
20240286246
Publication date
Aug 29, 2024
EBARA CORPORATION
Masayuki TAMURA
B24 - GRINDING POLISHING
Information
Patent Application
POLISHING APPARATUS
Publication number
20240227115
Publication date
Jul 11, 2024
EBARA CORPORATION
Tetsuya TERADA
B24 - GRINDING POLISHING
Information
Patent Application
APPARATUS FOR POLISHING, PROCESSING SYSTEM, AND METHOD OF POLISHING
Publication number
20210283746
Publication date
Sep 16, 2021
EBARA CORPORATION
Takuya MORIURA
B24 - GRINDING POLISHING