Tetsuya Yashima

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing device
- Patent number 11,869,788
- Issue date Jan 9, 2024
- Ebara Corporation
- Koji Maeda
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 10,688,622
- Issue date Jun 23, 2020
- Ebara Corporation
- Hiroshi Aono
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus and substrate processing apparatus
- Patent number 10,573,509
- Issue date Feb 25, 2020
- Ebara Corporation
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Polishing apparatus
- Patent number 7,942,725
- Issue date May 17, 2011
- Ebara Corporation
- Hiroomi Torii
- B24 - GRINDING POLISHING
Information Patent Grant
Polishing apparatus
- Patent number 7,445,543
- Issue date Nov 4, 2008
- Ebara Corporation
- Hiroomi Torii
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING DEVICE
- Publication number 20200388510
- Publication date Dec 10, 2020
- Koji MAEDA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20180001440
- Publication date Jan 4, 2018
- EBARA CORPORATION
- Hiroshi AONO
- B08 - CLEANING
Information Patent Application
CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170372893
- Publication date Dec 28, 2017
- EBARA CORPORATION
- Koji Maeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
POLISHING APPARATUS
- Publication number 20090068935
- Publication date Mar 12, 2009
- Hiroomi Torii
- B24 - GRINDING POLISHING
Information Patent Application
Polishing apparatus
- Publication number 20060292967
- Publication date Dec 28, 2006
- Hiroomi Torii
- B24 - GRINDING POLISHING