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Tetsuyai Watanabe
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Honjo-shi, JP
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last 30 patents
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Patent Grant
Method of detecting defects on an object
Patent number
7,940,383
Issue date
May 10, 2011
Hitachi, Ltd.
Minori Noguchi
B82 - NANO-TECHNOLOGY
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last 30 patents
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Patent Application
Apparatus And Method For Testing Defects
Publication number
20100088042
Publication date
Apr 8, 2010
Minori NOGUCHI
G01 - MEASURING TESTING