Tetsuyuki Arai

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Kanagawa, JP

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Patents Grantslast 30 patents

Information Patent Grant
Pattern inspection apparatus and pattern inspection method
- Patent number 7,872,745
- Issue date Jan 18, 2011
- Nuflare Technology, Inc.
- Takayuki Abe
- G01 - MEASURING TESTING
Information Patent Grant
Mask inspecting apparatus
- Patent number 4,870,693
- Issue date Sep 26, 1989
- Nikon Corporation
- Tetsuyuki Arai
- G06 - COMPUTING CALCULATING COUNTING

Patents Applicationslast 30 patents

Information Patent Application
PATTERN INSPECTION APPARATUS AND PATTERN INSPECTION METHOD
- Publication number 20090040513
- Publication date Feb 12, 2009
- NuFlare Technology, Inc.
- Takayuki ABE
- G01 - MEASURING TESTING