Tetsuyuki Okabayashi

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Tokyo, JP

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Patents Grantslast 30 patents

Information Patent Grant
Electron beam lithography system and method
- Patent number 6,605,811
- Issue date Aug 12, 2003
- Elionix Inc.
- Masanao Hotta
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Electron beam lithography system and method
- Publication number 20030089858
- Publication date May 15, 2003
- Masanao Hotta
- H01 - BASIC ELECTRIC ELEMENTS