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Portland, OR, US
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last 30 patents
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Patent Grant
Ex situ coating of chamber components for semiconductor processing
Patent number
11,365,479
Issue date
Jun 21, 2022
Lam Research Corporation
Damodar Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ex situ coating of chamber components for semiconductor processing
Patent number
10,760,158
Issue date
Sep 1, 2020
Lam Research Corporation
Damodar Shanbhag
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
COMPACT MODULAR GAS DISTRIBUTION PLUMBING AND HEATING SYSTEM FOR MU...
Publication number
20230377908
Publication date
Nov 23, 2023
LAM RESEARCH CORPORATION
Thadeous BAMFORD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VAPOR DELIVERY DEVICE
Publication number
20230374657
Publication date
Nov 23, 2023
LAM RESEARCH CORPORATION
Thadeous BAMFORD
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
Publication number
20230002891
Publication date
Jan 5, 2023
LAM RESEARCH CORPORATION
Damodar Rajaram SHANBHAG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
Publication number
20220275504
Publication date
Sep 1, 2022
LAM RESEARCH CORPORATION
Damodar Rajaram SHANBHAG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
Publication number
20200347497
Publication date
Nov 5, 2020
LAM RESEARCH CORPORATION
Damodar Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EX SITU COATING OF CHAMBER COMPONENTS FOR SEMICONDUCTOR PROCESSING
Publication number
20190185999
Publication date
Jun 20, 2019
LAM RESEARCH CORPORATION
Damodar Shanbhag
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...