Thang D. Nguyen

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Lawrence, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
System and method for electrostatic clamping of workpieces
- Patent number 9,871,473
- Issue date Jan 16, 2018
- Axcelis Technologies, Inc.
- Edward K. McIntyre
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR ELECTROSTATIC CLAMPING OF WORKPIECES
- Publication number 20160087557
- Publication date Mar 24, 2016
- Axcelis Technologies, Inc.
- Edward K. McIntyre
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER