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Thanh Nghia Tu
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San Jose, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Low temperature amorphous silicon sacrificial layer for controlled...
Patent number
8,358,458
Issue date
Jan 22, 2013
QUALCOMM MEMS Technologies, Inc.
James Randolph Webster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Eliminate release etch attack by interface modification in sacrific...
Patent number
8,222,066
Issue date
Jul 17, 2012
QUALCOMM MEMS Technologies, Inc.
Thanh Nghia Tu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Low temperature amorphous silicon sacrificial layer for controlled...
Patent number
7,851,239
Issue date
Dec 14, 2010
QUALCOMM MEMS Technologies, Inc.
James Randolph Webster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Anti-Reflection Coated Lens for Fast Axis Collimation
Publication number
20240184017
Publication date
Jun 6, 2024
WAYMO LLC
Thanh Tu
G01 - MEASURING TESTING
Information
Patent Application
LAYER FOR REDUCED CHARGE MIGRATION BETWEEN MEMS LAYERS
Publication number
20140210836
Publication date
Jul 31, 2014
QUALCOMM MEMS TECHNOLOGIES, INC.
Fan Zhong
G02 - OPTICS
Information
Patent Application
MULTICOMPONENT SACRIFICIAL STRUCTURE
Publication number
20120057216
Publication date
Mar 8, 2012
QUALCOMM MEMS TECHNOLOGIES, INC.
Lucio Flores
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED...
Publication number
20110051224
Publication date
Mar 3, 2011
QUALCOMM MEMS TECHNOLOGIES, INC.
James Randolph Webster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
LOW TEMPERATURE AMORPHOUS SILICON SACRIFICIAL LAYER FOR CONTROLLED...
Publication number
20090305010
Publication date
Dec 10, 2009
QUALCOMM MEMS TECHNOLOGIES, INC.
James Randolph Webster
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
ELIMINATE RELEASE ETCH ATTACK BY INTERFACE MODIFICATION IN SACRIFIC...
Publication number
20080311690
Publication date
Dec 18, 2008
QUALCOMM MEMS TECHNOLOGIES, INC.
Thanh Nghia Tu
B81 - MICRO-STRUCTURAL TECHNOLOGY