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Theo Wilhelmus Maria THIJSSEN
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Sub-field control of a lithographic process and associated apparatus
Patent number
11,662,666
Issue date
May 30, 2023
ASML Netherlands B.V.
Rowin Meijerink
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Method for evaluating control strategies in a semiconductor manufac...
Patent number
11,372,338
Issue date
Jun 28, 2022
ASML Netherlands B.V.
Ivo Matteo Leonardus Weijden
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
Publication number
20230288817
Publication date
Sep 14, 2023
ASML NETHERLANDS B.V.
Rowin MEIJERINK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
Publication number
20220334499
Publication date
Oct 20, 2022
ASML NETHERLANDS B.V.
Jacob Fredrik Friso KLINKHAMER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
SUB-FIELD CONTROL OF A LITHOGRAPHIC PROCESS AND ASSOCIATED APPARATUS
Publication number
20220171295
Publication date
Jun 2, 2022
ASML NETHERLANDS B.V.
Rowin MEIJERINK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR EVALUATING CONTROL STRATEGIES IN A SEMICONDUCTOR MANUFAC...
Publication number
20200401052
Publication date
Dec 24, 2020
ASML NETHERLANDS B.V.
Ivo Matteo Leonardus WEIJDEN
G01 - MEASURING TESTING