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DIRECTED MATERIAL ASSEMBLY
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Publication number 20110039061
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Publication date Feb 17, 2011
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Massachusetts Institute of Technology
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Theodore H. Fedynyshyn
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B81 - MICRO-STRUCTURAL TECHNOLOGY
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Inorganic Resist Sensitizer
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Publication number 20100021843
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Publication date Jan 28, 2010
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Massachusetts Institute of Technology
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Theodore H. Fedynyshyn
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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RESIST SENSITIZER
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Publication number 20100009289
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Publication date Jan 14, 2010
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Massachusetts Institute of Technology
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Theodore H. Fedynyshyn
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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MULTI-TONE RESIST COMPOSITIONS
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Publication number 20090068589
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Publication date Mar 12, 2009
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Massachusetts Institute of Technology
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Theodore H. Fedynyshyn
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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CONTRAST ENHANCING LAYERS
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Publication number 20080076060
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Publication date Mar 27, 2008
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Massachuetts Institute of Technology
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Theodore H. Fedynyshyn
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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IMMERSION FLUIDS FOR LITHOGRAPHY
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Publication number 20080063989
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Publication date Mar 13, 2008
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MASS INSTITUTE OF TECHNOLOGY
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Theodore H. Fedynyshyn
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C07 - ORGANIC CHEMISTRY
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Resist with reduced line edge roughness
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Publication number 20060078820
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Publication date Apr 13, 2006
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MASS INSTITUTE OF TECHNOLOGY (MIT)
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Theodore H. Fedynyshyn
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Sample preparation methods and devices
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Publication number 20050118570
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Publication date Jun 2, 2005
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Massachusetts Institute of Technology
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Mark A. Hollis
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B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
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High sensitivity X-ray photoresist
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Publication number 20040110091
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Publication date Jun 10, 2004
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MASS INSTITUTE OF TECHNOLOGY (MIT)
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Theodore H. Fedynyshyn
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Resist materials for 157-nm lithography
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Publication number 20030157431
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Publication date Aug 21, 2003
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MASS INSTITUTE OF TECHNOLOGY (MIT)
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Theodore H. Fedynyshyn
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G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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