Theodoros Panagopoulos

Follow

Person

Los Gatos, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Non-elastomeric, non-polymeric, non-metallic membrane valves for se...
- Patent number 11,796,085
- Issue date Oct 24, 2023
- Lam Research Corporation
- Mariusch Gregor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal atomic layer etch with rapid temperature cycling
- Patent number 11,380,556
- Issue date Jul 5, 2022
- Lam Research Corporation
- Theodoros Panagopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ultra-high vacuum transport and storage
- Patent number 10,153,282
- Issue date Dec 11, 2018
- Lam Research Corporation
- Theodoros Panagopoulos
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
NON-ELASTOMERIC, NON-POLYMERIC, NON-METALLIC MEMBRANE VALVES FOR SE...
- Publication number 20240044422
- Publication date Feb 8, 2024
- LAM RESEARCH CORPORATION
- Mariusch Gregor
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA DISCHARGE UNIFORMITY CONTROL USING MAGNETIC FIELDS
- Publication number 20230260768
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Theodoros Panagopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL ATOMIC LAYER ETCH WITH RAPID TEMPERATURE CYCLING
- Publication number 20220293431
- Publication date Sep 15, 2022
- LAM RESEARCH CORPORATION
- Theodoros Panagopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-ELASTOMERIC, NON-POLYMERIC, NON-METALLIC MEMBRANE VALVES FOR SE...
- Publication number 20220252183
- Publication date Aug 11, 2022
- LAM RESEARCH CORPORATION
- Mariusch Gregor
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
PLASMA ETCH TOOL FOR HIGH ASPECT RATIO ETCHING
- Publication number 20220165546
- Publication date May 26, 2022
- LAM RESEARCH CORPORATION
- Thorsten Lill
- H01 - BASIC ELECTRIC ELEMENTS