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Theodorus A. Fahner
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Eindhoven, NL
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last 30 patents
Information
Patent Grant
Apparatus for and method of projecting a mask pattern on a substrate
Patent number
5,144,363
Issue date
Sep 1, 1992
ASM Lithography B.V.
Stefan Wittekoek
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical imaging system provided with an opto-electronic detection s...
Patent number
4,356,392
Issue date
Oct 26, 1982
U.S. Philips Corporation
Stefan Wittekoek
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus for writing patterns in a layer on a substrate by means o...
Patent number
4,334,139
Issue date
Jun 8, 1982
U.S. Philips Corporation
Stefan Wittekoek
H01 - BASIC ELECTRIC ELEMENTS