Theodorus Wilhelmus POLET

Person

Grave, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Fluid handling system and lithographic apparatus
- Patent number 12,072,636
- Issue date Aug 27, 2024
- ASML Netherlands B.V.
- Theodorus Wilhelmus Polet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure for lithographic apparatus
- Patent number 11,860,546
- Issue date Jan 2, 2024
- ASML Netherlands B.V.
- Pepijn Van Den Eijnden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure, a lithographic apparatus, a method of usi...
- Patent number 11,809,086
- Issue date Nov 7, 2023
- ASML Netherlands B.V.
- Raphael Nico Johan Stegen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and device manufacturing method
- Patent number 11,774,857
- Issue date Oct 3, 2023
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Process tool and an inspection method
- Patent number 11,720,032
- Issue date Aug 8, 2023
- ASML Netherlands B.V.
- Raphael Nico Johan Stegen
- G01 - MEASURING TESTING
Information Patent Grant
Fluid handling structure and lithographic apparatus
- Patent number 11,614,689
- Issue date Mar 28, 2023
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid handling structure for lithographic apparatus
- Patent number 11,454,892
- Issue date Sep 27, 2022
- ASML Netherlands B.V.
- Pepijn Van Den Eijnden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and device manufacturing method
- Patent number 11,372,336
- Issue date Jun 28, 2022
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure and lithographic apparatus
- Patent number 11,231,653
- Issue date Jan 25, 2022
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluid handling structure, lithographic apparatus, and method of usi...
- Patent number 11,156,921
- Issue date Oct 26, 2021
- ASML Netherlands B.V.
- Raphael Nico Johan Stegen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of performance testing working parameters of a fluid handlin...
- Patent number 11,143,969
- Issue date Oct 12, 2021
- ASML Netherlands B.V.
- Giovanni Luca Gattobigio
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cleaning device and method of cleaning
- Patent number 11,086,239
- Issue date Aug 10, 2021
- ASML Netherlands B.V.
- Miao Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure for lithographic apparatus
- Patent number 11,029,607
- Issue date Jun 8, 2021
- ASML Netherlands B.V.
- Pepijn Van Den Eijnden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure and lithographic apparatus
- Patent number 10,969,695
- Issue date Apr 6, 2021
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate table, a lithographic apparatus and a method of operating...
- Patent number 10,571,810
- Issue date Feb 25, 2020
- ASML Netherlands B.V.
- Daan Daniel Johannes Antonius Van Sommeren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Object holder and lithographic apparatus
- Patent number 10,481,502
- Issue date Nov 19, 2019
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure and lithographic apparatus
- Patent number 10,416,571
- Issue date Sep 17, 2019
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a method of manufacturing a lithographic...
- Patent number 10,324,384
- Issue date Jun 18, 2019
- ASML Netherlands B.V.
- Gerben Pieterse
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate table, lithographic apparatus and method of operating a l...
- Patent number 10,317,804
- Issue date Jun 11, 2019
- ASML Netherlands B.V.
- Daan Daniel Johannes Antonius Van Sommeren
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a device manufacturing method
- Patent number 10,222,707
- Issue date Mar 5, 2019
- ASML Netherlands B.V.
- Theodorus Wilhelmus Polet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithographic apparatus and device manufacturing method
- Patent number 10,001,712
- Issue date Jun 19, 2018
- ASML Netherlands B.V.
- Theodorus Wilhelmus Polet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Object holder and lithographic apparatus
- Patent number 9,915,877
- Issue date Mar 13, 2018
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Object holder and lithographic apparatus
- Patent number 9,785,055
- Issue date Oct 10, 2017
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a device manufacturing method
- Patent number 9,274,436
- Issue date Mar 1, 2016
- ASML Netherlands B.V.
- Theodorus Wilhelmus Polet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
FLUID HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20240192607
- Publication date Jun 13, 2024
- ASML NETHERLANDS B.V.
- Theodorus Wilhelmus POLET
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS AND A METHOD OF MANUFACTURING A DEVICE
- Publication number 20240036477
- Publication date Feb 1, 2024
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS
- Publication number 20230333480
- Publication date Oct 19, 2023
- ASML NETHERLANDS B.V.
- Christianus Wilhelmus Johannes BERENDSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
- Publication number 20230053840
- Publication date Feb 23, 2023
- ASML NETHERLANDS B.V.
- Pepijn VAN DEN EIJNDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20220308459
- Publication date Sep 29, 2022
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
- Publication number 20220137519
- Publication date May 5, 2022
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS, A METHOD OF USI...
- Publication number 20220035254
- Publication date Feb 3, 2022
- ASML NETHERLANDS B.V.
- Raphael Nico Johan STEGEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A PROCESS TOOL AND AN INSPECTION METHOD
- Publication number 20210349397
- Publication date Nov 11, 2021
- ASML NETHERLANDS B.V.
- Raphael Nico Johan STEGEN
- G01 - MEASURING TESTING
Information Patent Application
FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
- Publication number 20210263424
- Publication date Aug 26, 2021
- ASML NETHERLANDS B.V.
- Pepijn VAN DEN EIJNDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS, AND METHOD OF USI...
- Publication number 20210191275
- Publication date Jun 24, 2021
- ASML NETHERLANDS B.V.
- Raphael Nico Johan STEGEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
- Publication number 20210181641
- Publication date Jun 17, 2021
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING DEVICE AND METHOD OF CLEANING
- Publication number 20210116824
- Publication date Apr 22, 2021
- ASML NETHERLANDS B.V.
- Miao YU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS
- Publication number 20200409270
- Publication date Dec 31, 2020
- ASML NETHERLANDS B.V.
- Pepijn VAN DEN EIJNDEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
- Publication number 20200004162
- Publication date Jan 2, 2020
- ASML NETHERLANDS H.V.
- Erik Henricus Egidius Catharina EUMMELEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING...
- Publication number 20190265597
- Publication date Aug 29, 2019
- ASML NETHERLANDS B.V.
- Daan Daniel Johannes Antonius VAN SOMMEREN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
- Publication number 20190004434
- Publication date Jan 3, 2019
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A L...
- Publication number 20180364584
- Publication date Dec 20, 2018
- ASML NETHERLANDS B.V.
- Daan Daniel Johannes Antonius VAN SOMMEREN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
- Publication number 20180267412
- Publication date Sep 20, 2018
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A LITHOGRAPHIC...
- Publication number 20180210350
- Publication date Jul 26, 2018
- ASML NETHERLANDS B.V.
- Gerben PIETERSE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A LITHOGRAPHIC APPARATUS, A PROJECTION SYSTEM, A LAST LENS ELEMENT,...
- Publication number 20180196354
- Publication date Jul 12, 2018
- ASML NETHERLANDS B.V.
- Cornelius Maria ROPS
- G02 - OPTICS
Information Patent Application
OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
- Publication number 20170315454
- Publication date Nov 2, 2017
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170219939
- Publication date Aug 3, 2017
- ASML NETHERLANDS B.V.
- Theodorus Wilhelmus POLET
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
- Publication number 20160179015
- Publication date Jun 23, 2016
- ASML NETHERLANDS B.V.
- Theodorus Wilhelmus POLET
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
- Publication number 20150131064
- Publication date May 14, 2015
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
- Publication number 20130149649
- Publication date Jun 13, 2013
- ASML NETHERLANDS B.V.
- Theodorus Wilhelmus POLET
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Theodorus Wilhelmus POLET

Person

Patents Grantslast 30 patents

Fluid handling system and lithographic apparatus

Fluid handling structure for lithographic apparatus

Fluid handling structure, a lithographic apparatus, a method of usi...

Lithography apparatus and device manufacturing method

Process tool and an inspection method

Fluid handling structure and lithographic apparatus

Fluid handling structure for lithographic apparatus

Lithography apparatus and device manufacturing method

Fluid handling structure and lithographic apparatus

Fluid handling structure, lithographic apparatus, and method of usi...

Method of performance testing working parameters of a fluid handlin...

Cleaning device and method of cleaning

Fluid handling structure for lithographic apparatus

Fluid handling structure and lithographic apparatus

Substrate table, a lithographic apparatus and a method of operating...

Object holder and lithographic apparatus

Fluid handling structure and lithographic apparatus

Lithographic apparatus and a method of manufacturing a lithographic...

Substrate table, lithographic apparatus and method of operating a l...

Lithographic apparatus and a device manufacturing method

Immersion lithographic apparatus and device manufacturing method

Object holder and lithographic apparatus

Object holder and lithographic apparatus

Lithographic apparatus and a device manufacturing method

Patents Applicationslast 30 patents

FLUID HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS

LITHOGRAPHY APPARATUS AND A METHOD OF MANUFACTURING A DEVICE

A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS

FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS

LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD

FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS

FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS, A METHOD OF USI...

A PROCESS TOOL AND AN INSPECTION METHOD

FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS

FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS, AND METHOD OF USI...

FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS

CLEANING DEVICE AND METHOD OF CLEANING

FLUID HANDLING STRUCTURE FOR LITHOGRAPHIC APPARATUS

FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS

SUBSTRATE TABLE, A LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING...

FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS

SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS AND METHOD OF OPERATING A L...

OBJECT HOLDER AND LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND A METHOD OF MANUFACTURING A LITHOGRAPHIC...

A LITHOGRAPHIC APPARATUS, A PROJECTION SYSTEM, A LAST LENS ELEMENT,...

OBJECT HOLDER AND LITHOGRAPHIC APPARATUS

IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD

OBJECT HOLDER AND LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD