Thibault Simon Mathieu Laurent

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and method
- Patent number 12,204,255
- Issue date Jan 21, 2025
- ASML Netherlands B.V.
- Nicolaas Ten Kate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of unloading an object from a support table
- Patent number 11,846,879
- Issue date Dec 19, 2023
- ASML Netherland B.V.
- Giovanna De Simone
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support table for a lithographic apparatus, lithographic apparatus...
- Patent number 11,650,511
- Issue date May 16, 2023
- ASML Netherlands B.V.
- Johan Gertrudis Cornelis Kunnen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and method
- Patent number 11,630,399
- Issue date Apr 18, 2023
- ASML Netherlands B.V.
- Nicolaas Ten Kate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of unloading an object from a support table
- Patent number 11,500,296
- Issue date Nov 15, 2022
- ASML Netherlands B.V.
- Giovanna De Simone
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a device manufacturing method
- Patent number RE49297
- Issue date Nov 15, 2022
- ASML Netherlands B.V.
- Hrishikesh Patel
Information Patent Grant
Lithographic apparatus and an object positioning system
- Patent number RE49142
- Issue date Jul 19, 2022
- ASML Netherlands B.V.
- Adrianus Hendrik Koevoets
Information Patent Grant
Extraction body for lithographic apparatus
- Patent number 11,385,547
- Issue date Jul 12, 2022
- ASML Netherlands B.V.
- Gijs Kramer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, support table for a lithographic apparatus...
- Patent number 11,300,890
- Issue date Apr 12, 2022
- ASML Netherlands B.V.
- Johan Gertrudis Cornelis Kunnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 11,281,115
- Issue date Mar 22, 2022
- ASML Netherlands B.V.
- Nicolaas Ten Kate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of unloading an object from a support table
- Patent number 11,175,594
- Issue date Nov 16, 2021
- ASML Netherlands B.V.
- Giovanna De Simone
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Temperature sensing probe, burl plate, lithographic apparatus and m...
- Patent number RE48668
- Issue date Aug 3, 2021
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
Information Patent Grant
Lithographic apparatus
- Patent number 10,788,763
- Issue date Sep 29, 2020
- ASML Netherlands B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support table for a lithographic apparatus, lithographic apparatus...
- Patent number 10,747,126
- Issue date Aug 18, 2020
- ASML Netherlands B.V.
- Johan Gertrudis Cornelis Kunnen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extraction body for lithographic apparatus
- Patent number 10,705,426
- Issue date Jul 7, 2020
- ASML Netherlands B.V.
- Gijs Kramer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 10,591,828
- Issue date Mar 17, 2020
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 10,551,752
- Issue date Feb 4, 2020
- ASML Netherlands B.V.
- Nicolaas Ten Kate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, support table for a lithographic apparatus...
- Patent number 10,520,837
- Issue date Dec 31, 2019
- ASML Netherlands B.V.
- Johan Gertrudis Cornelis Kunnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measurement substrate and a measurement method
- Patent number 10,508,896
- Issue date Dec 17, 2019
- ASML Netherlands B.V.
- Stoyan Nihtianov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,495,985
- Issue date Dec 3, 2019
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Object holder and lithographic apparatus
- Patent number 10,481,502
- Issue date Nov 19, 2019
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support table for a lithographic apparatus, lithographic apparatus...
- Patent number 10,324,382
- Issue date Jun 18, 2019
- ASML Netherlands B.V.
- Johan Gertrudis Cornelis Kunnen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithographic apparatus and method
- Patent number 10,203,611
- Issue date Feb 12, 2019
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a device manufacturing method
- Patent number 10,191,377
- Issue date Jan 29, 2019
- ASML Netherlands, B.V.
- Hrishikesh Patel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,114,295
- Issue date Oct 30, 2018
- ASML Netherlands B.V.
- Günes Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support table for a lithographic apparatus, lithographic apparatus...
- Patent number 9,971,252
- Issue date May 15, 2018
- ASML Netherlands B.V.
- Johan Gertrudis Cornelis Kunnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sensor, lithographic apparatus and device manufacturing method
- Patent number 9,971,254
- Issue date May 15, 2018
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and an object positioning system
- Patent number 9,939,738
- Issue date Apr 10, 2018
- ASML Netherlands B.V.
- Adrianus Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Object holder and lithographic apparatus
- Patent number 9,915,877
- Issue date Mar 13, 2018
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure, a lithographic apparatus and a device man...
- Patent number 9,904,177
- Issue date Feb 27, 2018
- ASML Netherlands B.V.
- Ivo Adam Johannes Thomas
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20250138440
- Publication date May 1, 2025
- ASML NETHERLANDS B.V.
- Nicolaas Ten Kate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
- Publication number 20230280663
- Publication date Sep 7, 2023
- ASML NETHERLANDS B.V.
- Johan Gertrudis Cornelis KUNNEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20230273533
- Publication date Aug 31, 2023
- ASML NETHERLANDS B.V.
- Nicolaas Ten Kate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF UNLOADING AN OBJECT FROM A SUPPORT TABLE
- Publication number 20230054421
- Publication date Feb 23, 2023
- ASML NETHERLANDS B.V.
- Giovanna DE SIMONE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20220206400
- Publication date Jun 30, 2022
- ASML NETHERLANDS B.V.
- Nicolaas TEN KATE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF UNLOADING AN OBJECT FROM A SUPPORT TABLE
- Publication number 20220057722
- Publication date Feb 24, 2022
- ASML NETHERLANDS B.V.
- Giovanna DE SIMONE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF UNLOADING AN OBJECT FROM A SUPPORT TABLE
- Publication number 20210132510
- Publication date May 6, 2021
- ASML NETHERLANDS B.V.
- Giovanna DE SIMONE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
- Publication number 20200371447
- Publication date Nov 26, 2020
- ASML NETHERLANDS B.V.
- Johan Gertrudis Cornelis KUNNEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTRACTION BODY FOR LITHOGRAPHIC APPARATUS
- Publication number 20200285154
- Publication date Sep 10, 2020
- ASML NETHERLANDS B.V.
- Gijs KRAMER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20200142325
- Publication date May 7, 2020
- ASML NETHERLANDS B.V.
- Nicolaas Ten Kate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS...
- Publication number 20200124993
- Publication date Apr 23, 2020
- AS ML NETHERLANDS B.V.
- Johan Gertrudis Cornelis KUNNEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
- Publication number 20190294056
- Publication date Sep 26, 2019
- ASML NETHERLANDS B.V.
- Johan Gertrudis Cornelis KUNNEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20190171113
- Publication date Jun 6, 2019
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
EXTRACTION BODY FOR LITHOGRAPHIC APPARATUS
- Publication number 20190163066
- Publication date May 30, 2019
- ASML NETHERLANDS B.V.
- Gijs KRAMER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190041761
- Publication date Feb 7, 2019
- ASML Netherlands B.V.
- Gunes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MEASUREMENT SUBSTRATE AND A MEASUREMENT METHOD
- Publication number 20180340767
- Publication date Nov 29, 2018
- ASML NETHERLANDS B.V.
- Stoyan NIHTIANOV
- G01 - MEASURING TESTING
Information Patent Application
Lithographic apparatus, support table for a lithographic apparatus...
- Publication number 20180284627
- Publication date Oct 4, 2018
- ASML NETHERLANDS B.V.
- Johan Gertrudis Cornelis Kunnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
- Publication number 20180267412
- Publication date Sep 20, 2018
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
- Publication number 20180239265
- Publication date Aug 23, 2018
- ASML NETHERLANDS B.V.
- Johan Gertrudis Cornelis KUNNEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20180074411
- Publication date Mar 15, 2018
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170363964
- Publication date Dec 21, 2017
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
- Publication number 20170351187
- Publication date Dec 7, 2017
- ASML NETHERLANDS B.V.
- Johan Gertrudis Cornelis KUNNEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
- Publication number 20170315454
- Publication date Nov 2, 2017
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170261864
- Publication date Sep 14, 2017
- ASML NETHERLANDS B.V.
- Gunes NAKIBOGLU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A LITHOGRAPHIC APPARATUS AND AN OBJECT POSITIONING SYSTEM
- Publication number 20170212429
- Publication date Jul 27, 2017
- ASML NETHERLANDS B.V.
- Adrianus Hendrik KOEVOETS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
- Publication number 20170212421
- Publication date Jul 27, 2017
- ASML NETHERLANDS B.V.
- Hrishikesh PATEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
- Publication number 20170176872
- Publication date Jun 22, 2017
- ASML NETHERLANDS B.V.
- Johan Gertrudis Cornelis KUNNEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20170068175
- Publication date Mar 9, 2017
- ASML NETHERLANDS B.V.
- Jan Steven Christiaan Westerlaken
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20160202618
- Publication date Jul 14, 2016
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
- Publication number 20150277243
- Publication date Oct 1, 2015
- ASML NETHERLANDS B.V.
- Johan Gertrudis Cornelis KUNNEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Thibault Simon Mathieu Laurent

Person

Patents Grantslast 30 patents

Lithographic apparatus and method

Method of unloading an object from a support table

Support table for a lithographic apparatus, lithographic apparatus...

Lithographic apparatus and method

Method of unloading an object from a support table

Lithographic apparatus and a device manufacturing method

Lithographic apparatus and an object positioning system

Extraction body for lithographic apparatus

Lithographic apparatus, support table for a lithographic apparatus...

Lithographic apparatus and method

Method of unloading an object from a support table

Temperature sensing probe, burl plate, lithographic apparatus and m...

Lithographic apparatus

Support table for a lithographic apparatus, lithographic apparatus...

Extraction body for lithographic apparatus

Lithographic apparatus and method

Lithographic apparatus and method

Lithographic apparatus, support table for a lithographic apparatus...

Measurement substrate and a measurement method

Lithographic apparatus and device manufacturing method

Object holder and lithographic apparatus

Support table for a lithographic apparatus, lithographic apparatus...

Lithographic apparatus and method

Lithographic apparatus and a device manufacturing method

Lithographic apparatus and device manufacturing method

Support table for a lithographic apparatus, lithographic apparatus...

Sensor, lithographic apparatus and device manufacturing method

Lithographic apparatus and an object positioning system

Object holder and lithographic apparatus

Fluid handling structure, a lithographic apparatus and a device man...

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS AND METHOD

SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...

LITHOGRAPHIC APPARATUS AND METHOD

METHOD OF UNLOADING AN OBJECT FROM A SUPPORT TABLE

LITHOGRAPHIC APPARATUS AND METHOD

METHOD OF UNLOADING AN OBJECT FROM A SUPPORT TABLE

METHOD OF UNLOADING AN OBJECT FROM A SUPPORT TABLE

SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...

EXTRACTION BODY FOR LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND METHOD

LITHOGRAPHIC APPARATUS, SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS...

SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...

LITHOGRAPHIC APPARATUS AND METHOD

EXTRACTION BODY FOR LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

MEASUREMENT SUBSTRATE AND A MEASUREMENT METHOD

Lithographic apparatus, support table for a lithographic apparatus...

OBJECT HOLDER AND LITHOGRAPHIC APPARATUS

SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...

LITHOGRAPHIC APPARATUS AND METHOD

SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...

OBJECT HOLDER AND LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

A LITHOGRAPHIC APPARATUS AND AN OBJECT POSITIONING SYSTEM

LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD

SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...

LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND METHOD

SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...