Thilo Pollak

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Neresheim, DE

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Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT...
- Publication number 20240085800
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- Thilo Pollak
- G02 - OPTICS
Information Patent Application
OPTICAL DEVICE, METHOD FOR ADJUSTING A SETPOINT DEFORMATION AND LIT...
- Publication number 20240085783
- Publication date Mar 14, 2024
- Carl Zeiss SMT GMBH
- Markus Raab
- G02 - OPTICS
Information Patent Application
A PROJECTION OBJECTIVE INCLUDING AN OPTICAL DEVICE
- Publication number 20230142187
- Publication date May 11, 2023
- Carl Zeiss SMT GMBH
- Johannes Lippert
- G02 - OPTICS
Information Patent Application
MIRROR ASSEMBLY HAVING A HYDROGEN BARRIER AND OPTICAL ASSEMBLY
- Publication number 20220206401
- Publication date Jun 30, 2022
- Carl Zeiss SMT GMBH
- Alexandra PAZIDIS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MIRROR ASSEMBLY AND OPTICAL ASSEMBLY COMPRISING SAME
- Publication number 20220187516
- Publication date Jun 16, 2022
- Carl Zeiss SMT GMBH
- Alexandra PAZIDIS
- G02 - OPTICS
Information Patent Application
MODULE FOR A PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOG...
- Publication number 20210255554
- Publication date Aug 19, 2021
- Carl Zeiss SMT GMBH
- Thilo Pollak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY