Thirumal Thanigaivelan

Follow

Person

North Andover, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Optimized halo or pocket cold implants
- Patent number 8,012,843
- Issue date Sep 6, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to improve uniformity of chemical mechanical polishing plana...
- Patent number 7,767,583
- Issue date Aug 3, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Deepak Ramappa
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
OPTIMIZED HALO OR POCKET COLD IMPLANTS
- Publication number 20110033998
- Publication date Feb 10, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLD IMPLANT FOR OPTIMIZED SILICIDE FORMATION
- Publication number 20110034014
- Publication date Feb 10, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Christopher R. Hatem
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO IMPROVE UNIFORMITY OF CHEMICAL MECHANICAL POLISHING PLANA...
- Publication number 20090227087
- Publication date Sep 10, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Deepak RAMAPPA
- H01 - BASIC ELECTRIC ELEMENTS