Thirumany Sritharan

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Singapore, SG

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Patents Applicationslast 30 patents

Information Patent Application
Method for forming an ultrathin Cu barrier/seed bilayer for integra...
- Publication number 20110048957
- Publication date Mar 3, 2011
- CHARTERED SEMICONDUCTOR MANUFACTURING, LTD.
- Martina Damayanti
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR