Thomas A. Gunther

Person

  • Hopewell Junction, NY, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma etching reactor with reduced plasma potential

    • Patent number 4,600,464
    • Issue date Jul 15, 1986
    • International Business Machines Corporation
    • Brian H. Desilets
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Reactive ion etching chamber

    • Patent number 4,384,938
    • Issue date May 24, 1983
    • International Business Machines Corporation
    • Brian H. Desilets
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Etch end point detector using gas flow changes

    • Patent number 4,362,596
    • Issue date Dec 7, 1982
    • International Business Machines Corp.
    • Brian H. Desilets
    • B81 - MICRO-STRUCTURAL TECHNOLOGY