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Thomas Adriaan Ooms
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Delfgauw, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Interferometer module
Patent number
9,690,215
Issue date
Jun 27, 2017
Mapper Lithography IP B.V.
Guido de Boer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithography system with differential interferometer module
Patent number
9,678,443
Issue date
Jun 13, 2017
Mapper Lithography IP B.V.
Guido de Boer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Multi-axis differential interferometer
Patent number
9,551,563
Issue date
Jan 24, 2017
Mapper Lithography IP B.V.
Godefridus Cornelius Antonius Couweleers
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Alignment of an interferometer module for use in an exposure tool
Patent number
9,261,800
Issue date
Feb 16, 2016
Mapper Lithography IP B.V.
Guido de Boer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Interferometer module
Patent number
9,069,265
Issue date
Jun 30, 2015
Mapper Lithography IP B.V.
Guido de Boer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHY SYSTEM WITH DIFFERENTIAL INTERFEROMETER MODULE
Publication number
20170277043
Publication date
Sep 28, 2017
MAPPER LITHOGRAPHY IP BV
Guido de Boer
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETER MODULE
Publication number
20150268032
Publication date
Sep 24, 2015
MAPPER LITHOGRAPHY IP BV
Guido de Boer
G01 - MEASURING TESTING
Information
Patent Application
MULTI-AXIS DIFFERENTIAL INTERFEROMETER
Publication number
20150241200
Publication date
Aug 27, 2015
MAPPER LITHOGRAPHY IP BV
Godefridus Cornelius Antonius Couweleers
G01 - MEASURING TESTING
Information
Patent Application
INTERFEROMETER MODULE
Publication number
20120250026
Publication date
Oct 4, 2012
Guido do Boer
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHY SYSTEM WITH DIFFERENTIAL INTERFEROMETER MODULE
Publication number
20120249984
Publication date
Oct 4, 2012
Guido de Boer
G01 - MEASURING TESTING
Information
Patent Application
ALIGNMENT OF AN INTERFEROMETER MODULE FOR USE IN AN EXPOSURE TOOL
Publication number
20120250030
Publication date
Oct 4, 2012
Guido de Boer
G01 - MEASURING TESTING