Thomas Andre Casavant

Person

  • Cupertino, CA, US

Patents Grantslast 30 patents

  • Information Patent Grant

    Dark field diffraction based overlay

    • Patent number 8,817,273
    • Issue date Aug 26, 2014
    • Nanometrics Incorporated
    • Hwan J. Jeong
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

  • Information Patent Application

    DARK FIELD DIFFRACTION BASED OVERLAY

    • Publication number 20130278942
    • Publication date Oct 24, 2013
    • Nanometrics Incorporated
    • Hwan J. Jeong
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY