Membership
Tour
Register
Log in
Thomas Andre Casavant
Follow
Person
Cupertino, CA, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Dark field diffraction based overlay
Patent number
8,817,273
Issue date
Aug 26, 2014
Nanometrics Incorporated
Hwan J. Jeong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
DARK FIELD DIFFRACTION BASED OVERLAY
Publication number
20130278942
Publication date
Oct 24, 2013
Nanometrics Incorporated
Hwan J. Jeong
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY