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Thomas B. Kielbaso
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Colorado Springs, CO, US
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last 30 patents
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Patent Grant
Environmental control in a reticle SMIF pod
Patent number
7,400,383
Issue date
Jul 15, 2008
Entegris, Inc.
David L. Halbmaier
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Environmental control in a reticle SMIF pod
Publication number
20060266011
Publication date
Nov 30, 2006
David L. Halbmaier
H01 - BASIC ELECTRIC ELEMENTS