Thomas Beck

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Kirchber/Murr, DE

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Patents Grantslast 30 patents

Information Patent Grant
DEVICE AND METHOD FOR THE HIGH-FREQUENCY ETCHING OF A SUBSTRATE USI...
- Patent number 6,720,273
- Issue date Apr 13, 2004
- Robert Bosch GmbH
- Volker Becker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma etching installation
- Patent number 6,531,031
- Issue date Mar 11, 2003
- Robert Bosch GmbH
- Volker Becker
- H01 - BASIC ELECTRIC ELEMENTS