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Thomas Brauner
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Jena, DE
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last 30 patents
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Patent Grant
Device for the generation of a gas curtain for plasma-based EUV rad...
Patent number
7,750,327
Issue date
Jul 6, 2010
Xtreme technologies GmbH
Chinh Duc Tran
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Radiation source for the generation of short-wavelength radiation
Patent number
7,233,013
Issue date
Jun 19, 2007
Xtreme technologies GmbH
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
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Patent Application
DEVICE FOR THE GENERATION OF A GAS CURTAIN FOR PLASMA-BASED EUV RAD...
Publication number
20080283779
Publication date
Nov 20, 2008
XTREME technologies GmbH;
Chinh Duc TRAN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Plasma radiation source
Publication number
20060226377
Publication date
Oct 12, 2006
XTREME technologies GmbH;
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Radiation source for the generation of short-wavelength radiation
Publication number
20060219959
Publication date
Oct 5, 2006
XTREME technologies GmbH;
Guido Hergenhan
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR