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Thomas E. McKelvey
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Ramona, CA, US
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last 30 patents
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Patent Grant
6 KHz and above gas discharge laser system
Patent number
8,855,166
Issue date
Oct 7, 2014
Cymer, LLC
Richard C. Ujazdowski
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
6 KHZ AND ABOVE GAS DISCHARGE LASER SYSTEM
Publication number
20120120974
Publication date
May 17, 2012
Richard C. Ujazdowski
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
6 Khz and above gas discharge laser system
Publication number
20060222034
Publication date
Oct 5, 2006
Cymer, Inc.
Richard C. Ujazdowski
H01 - BASIC ELECTRIC ELEMENTS