Membership
Tour
Register
Log in
Thomas Elster
Follow
Person
Jena, DE
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Arrangement for the illumination of a substrate with a plurality of...
Patent number
8,148,702
Issue date
Apr 3, 2012
Vistec Electron Beam GmbH
Hans-Joachim Doering
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Illumination condenser for a particle optical projection system
Patent number
7,601,969
Issue date
Oct 13, 2009
Vistec Electron Beam GmbH
Hans-Joachim Doering
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Correction lens system for a particle beam projection device
Patent number
7,560,713
Issue date
Jul 14, 2009
Vistec Electron Beam GmbH
Hans-Joachim Doering
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic deflection system for corpuscular radiation
Patent number
7,491,946
Issue date
Feb 17, 2009
Leica Microsystems Lithography GmbH
Stefan Risse
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Method and device for exposing a substrate to light
Patent number
6,600,162
Issue date
Jul 29, 2003
Leica Microsystems Lithography GmbH
Peter Hahmann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device for electrostatic deflection of a particle beam
Patent number
6,541,776
Issue date
Apr 1, 2003
Leica Microsystems Lithography GmbH
Hans-Joachim Döring
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Arrangement for the Illumination of a Substrate with a Plurality of...
Publication number
20100148087
Publication date
Jun 17, 2010
VISTEC ELECTRON BEAM GMBH
Hans-Joachim Doering
B82 - NANO-TECHNOLOGY
Information
Patent Application
Illumination Condenser for a Particle Optical Projection System
Publication number
20080035853
Publication date
Feb 14, 2008
Vistec Electron Beam GmbH
Hans-Joachim Doering
B82 - NANO-TECHNOLOGY
Information
Patent Application
Correction Lens System for a Particle Beam Projection Device
Publication number
20070215812
Publication date
Sep 20, 2007
Hans-Joachim Doering
B82 - NANO-TECHNOLOGY
Information
Patent Application
Electrostatic deflection system for corpuscular radiation
Publication number
20060192133
Publication date
Aug 31, 2006
LEICA MICROSYSTEMS LITHOGRAPHY GmbH
Stefan Risse
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING