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Thomas Fitzgerald
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Gilbert, AZ, US
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last 30 patents
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Patent Application
REACTANT VAPOR DELIVERY SYSTEMS FOR SEMICONDUCTOR PROCESSING TOOLS...
Publication number
20230175126
Publication date
Jun 8, 2023
ASM IP HOLDING B.V.
Jianqiu Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
GAS-PHASE REACTOR SYSTEM AND METHOD OF CLEANING SAME
Publication number
20230089167
Publication date
Mar 23, 2023
ASM IP HOLDING B.V.
Jianqiu Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
BAFFLE FOR A REACTOR SYSTEM
Publication number
20230063286
Publication date
Mar 2, 2023
ASM IP HOLDING B.V.
Thomas Fitzgerald
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEALING SYSTEM FOR A REACTOR SYSTEM
Publication number
20230061477
Publication date
Mar 2, 2023
ASM IP HOLDING B.V.
Thomas Fitzgerald
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VENTED SUSCEPTOR
Publication number
20210398843
Publication date
Dec 23, 2021
ASM IP HOLDING B.V.
Thomas Fitzgerald
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...