Thomas Fitzgerald

Person

  • Gilbert, AZ, US

Patents Applicationslast 30 patents

  • Information Patent Application

    REACTANT VAPOR DELIVERY SYSTEMS FOR SEMICONDUCTOR PROCESSING TOOLS...

    • Publication number 20230175126
    • Publication date Jun 8, 2023
    • ASM IP HOLDING B.V.
    • Jianqiu Huang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS-PHASE REACTOR SYSTEM AND METHOD OF CLEANING SAME

    • Publication number 20230089167
    • Publication date Mar 23, 2023
    • ASM IP HOLDING B.V.
    • Jianqiu Huang
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    BAFFLE FOR A REACTOR SYSTEM

    • Publication number 20230063286
    • Publication date Mar 2, 2023
    • ASM IP HOLDING B.V.
    • Thomas Fitzgerald
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEALING SYSTEM FOR A REACTOR SYSTEM

    • Publication number 20230061477
    • Publication date Mar 2, 2023
    • ASM IP HOLDING B.V.
    • Thomas Fitzgerald
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VENTED SUSCEPTOR

    • Publication number 20210398843
    • Publication date Dec 23, 2021
    • ASM IP HOLDING B.V.
    • Thomas Fitzgerald
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...