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Thomas Foltyn
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Zwickan, DE
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last 30 patents
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Patent Grant
Method of selectively forming a conductive barrier layer by ALD
Patent number
8,173,538
Issue date
May 8, 2012
Advanced Micro Devices, Inc.
Frank Feustel
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
METHOD OF SELECTIVELY FORMING A CONDUCTIVE BARRIER LAYER BY ALD
Publication number
20080132057
Publication date
Jun 5, 2008
Frank Feustel
H01 - BASIC ELECTRIC ELEMENTS