Thomas Frank

Person

Saalfeld, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for characterizing a microlithographic mask
- Patent number 11,619,882
- Issue date Apr 4, 2023
- Carl Zeiss SMT GmbH
- Ulrich Matejka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for characterizing a microlithographic mask
- Patent number 11,112,702
- Issue date Sep 7, 2021
- Carl Zeiss SMT GmbH
- Sven Martin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device for determining the exposure energy during the exposure of a...
- Patent number 11,079,604
- Issue date Aug 3, 2021
- Carl Zeiss SMT GmbH
- Thomas Frank
- G02 - OPTICS
Information Patent Grant
Method and device for characterizing a mask for microlithography
- Patent number 10,698,318
- Issue date Jun 30, 2020
- Carl Zeiss SMT GmbH
- Holger Seitz
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical unit for a metrology system and metrology syst...
- Patent number 10,578,881
- Issue date Mar 3, 2020
- Carl Zeiss AG
- Thomas Frank
- G02 - OPTICS
Information Patent Grant
Illumination optical unit for a metrology system and metrology syst...
- Patent number 10,168,539
- Issue date Jan 1, 2019
- Carl Zeiss SMT GmbH
- Thomas Frank
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination optical unit for a metrology system and metrology syst...
- Patent number 9,904,060
- Issue date Feb 27, 2018
- Carl Zeiss AG
- Thomas Frank
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Microscope and method for characterizing structures on an object
- Patent number 9,268,124
- Issue date Feb 23, 2016
- Carl Zeiss SMS GmbH
- Holger Seitz
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
MEASUREMENT APPARATUS, METHOD FOR OPERATING A MASK-METROLOGY MEASUR...
- Publication number 20240255857
- Publication date Aug 1, 2024
- Carl Zeiss SMT GMBH
- Jan Reisloehner
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND APPARATUS FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK
- Publication number 20220075272
- Publication date Mar 10, 2022
- Carl Zeiss SMT GMBH
- Ulrich Matejka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK
- Publication number 20210063892
- Publication date Mar 4, 2021
- Carl Zeiss SMT GMBH
- Sven Martin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE FOR DETERMINING THE EXPOSURE ENERGY DURING THE EXPOSURE OF A...
- Publication number 20200103668
- Publication date Apr 2, 2020
- Carl Zeiss SMT GMBH
- Thomas Frank
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...
- Publication number 20190121145
- Publication date Apr 25, 2019
- Carl-Zeiss AG
- Thomas Frank
- G02 - OPTICS
Information Patent Application
METHOD AND DEVICE FOR CHARACTERIZING A MASK FOR MICROLITHOGRAPHY
- Publication number 20190011839
- Publication date Jan 10, 2019
- Carl Zeiss SMT GMBH
- Holger Seitz
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...
- Publication number 20180173001
- Publication date Jun 21, 2018
- Carl-Zeiss AG
- Thomas Frank
- G02 - OPTICS
Information Patent Application
ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...
- Publication number 20150001408
- Publication date Jan 1, 2015
- Carl-Zeiss AG
- Thomas Frank
- G01 - MEASURING TESTING
Information Patent Application
MICROSCOPE AND METHOD FOR CHARACTERIZING STRUCTURES ON AN OBJECT
- Publication number 20130321609
- Publication date Dec 5, 2013
- Holger Seitz
- G02 - OPTICS

Thomas Frank

Person

Patents Grantslast 30 patents

Method and apparatus for characterizing a microlithographic mask

Device and method for characterizing a microlithographic mask

Device for determining the exposure energy during the exposure of a...

Method and device for characterizing a mask for microlithography

Illumination optical unit for a metrology system and metrology syst...

Illumination optical unit for a metrology system and metrology syst...

Illumination optical unit for a metrology system and metrology syst...

Microscope and method for characterizing structures on an object

Patents Applicationslast 30 patents

MEASUREMENT APPARATUS, METHOD FOR OPERATING A MASK-METROLOGY MEASUR...

METHOD AND APPARATUS FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

DEVICE AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK

DEVICE FOR DETERMINING THE EXPOSURE ENERGY DURING THE EXPOSURE OF A...

ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...

METHOD AND DEVICE FOR CHARACTERIZING A MASK FOR MICROLITHOGRAPHY

ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...

ILLUMINATION OPTICAL UNIT FOR A METROLOGY SYSTEM AND METROLOGY SYST...

MICROSCOPE AND METHOD FOR CHARACTERIZING STRUCTURES ON AN OBJECT